发明授权
- 专利标题: Laser chamber with minimized acoustic and shock wave disturbances
- 专利标题(中): 激光室具有最小化的声波和冲击波干扰
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申请号: US36158申请日: 1998-03-06
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公开(公告)号: US5978405A公开(公告)日: 1999-11-02
- 发明人: Tibor Juhasz , Richard C. Ujazdowski , Herve A. Besaucele , Robert G. Ozarski , James H. Azzola
- 申请人: Tibor Juhasz , Richard C. Ujazdowski , Herve A. Besaucele , Robert G. Ozarski , James H. Azzola
- 申请人地址: CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: CA San Diego
- 主分类号: H01S3/038
- IPC分类号: H01S3/038 ; H01S3/032 ; H01S3/036 ; H01S3/225 ; H01S3/22
摘要:
A laser chamber has angled reflectors that reflect acoustic and shock waves away from the laser discharge area to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves. The walls of the laser chamber may also be covered with an acoustic and shock wave absorbing material, such as felt metal. In other embodiments, the walls of the laser chamber are modulated with grooves, such as triangular or rectangular horizontal grooves, which scatter incident waves and generate interference within reflected waves.
公开/授权文献
- USD368859S Combined container and cap 公开/授权日:1996-04-16
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