发明授权
US5978409A Line narrowing apparatus with high transparency prism beam expander
有权
具有高透明棱镜光束扩张器的线条变窄装置
- 专利标题: Line narrowing apparatus with high transparency prism beam expander
- 专利标题(中): 具有高透明棱镜光束扩张器的线条变窄装置
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申请号: US162341申请日: 1998-09-28
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公开(公告)号: US5978409A公开(公告)日: 1999-11-02
- 发明人: Palash P. Das , Alexander I. Ershov , Richard G. Morton
- 申请人: Palash P. Das , Alexander I. Ershov , Richard G. Morton
- 申请人地址: CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: CA San Diego
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H01S3/03 ; H01S3/08 ; H01S3/1055 ; H01S3/137 ; H01S3/225
摘要:
A grating based line-narrowing apparatus having a prism beam expander with at least four prisms. Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as Al.sub.2 O.sub.3, is applied to the hypotenuse face of each prism, providing an efficient, anti-reflection coating. In a preferred embodiment the incident angle of the four prisms are each at about 68.2 degrees. The laser of the preferred embodiment has similar line narrowing efficiency and bandwidth as that for a laser with a 3 prism, ideal multi-layer anti-reflection coated beam expander. The primary benefit of the new four prism arrangement is that the prism coatings should be much less expensive and have greatly increased durability. Applicants have tested the new prisms for 30 million, 10 mJ pulses in air with no noticeable degradation. No present day dielectric multi-layer stack coating could survive such exposure.
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