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155 条记录 (耗时 0.032 秒)

    Line narrowing apparatus with high transparency prism beam expander
    2.
    发明授权
    Line narrowing apparatus with high transparency prism beam expander 有权
    具有高透明棱镜光束扩张器的线条变窄装置

    公开(公告)号：US5978409A

    公开(公告)日：1999-11-02

    申请号：US162341

    申请日：1998-09-28

    申请人： Palash P. Das ,  Alexander I. Ershov ,  Richard G. Morton

    发明人： Palash P. Das ,  Alexander I. Ershov ,  Richard G. Morton

    IPC分类号： G03F7/20 ,  H01S3/03 ,  H01S3/08 ,  H01S3/1055 ,  H01S3/137 ,  H01S3/225

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/1055

    摘要： A grating based line-narrowing apparatus having a prism beam expander with at least four prisms. Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as Al.sub.2 O.sub.3, is applied to the hypotenuse face of each prism, providing an efficient, anti-reflection coating. In a preferred embodiment the incident angle of the four prisms are each at about 68.2 degrees. The laser of the preferred embodiment has similar line narrowing efficiency and bandwidth as that for a laser with a 3 prism, ideal multi-layer anti-reflection coated beam expander. The primary benefit of the new four prism arrangement is that the prism coatings should be much less expensive and have greatly increased durability. Applicants have tested the new prisms for 30 million, 10 mJ pulses in air with no noticeable degradation. No present day dielectric multi-layer stack coating could survive such exposure.

    摘要翻译： 一种基于光栅的线条变窄装置，具有至少具有四个棱镜的棱镜扩束器。 每个棱镜定位在67和71度之间的入射角。 高折射率的单层涂层，诸如Al2O3的坚固材料被施加到每个棱镜的斜边面，从而提供有效的抗反射涂层。 在一个优选实施例中，四个棱镜的入射角分别为约68.2度。 优选实施例的激光器具有与具有3棱镜，理想的多层抗反射涂层光束扩展器的激光器相似的线窄化效率和带宽。 新的四棱镜布置的主要优点是棱镜涂层应该便宜得多，并且耐久性大大提高。 申请人已经在空气中测试了新的棱镜3000万，10 mJ脉冲，没有明显的退化。 没有现在的电介质多层堆叠涂层可以经受这样的曝光。

    Narrow band laser with fine wavelength control
    5.
    发明授权
    Narrow band laser with fine wavelength control 有权
    窄带激光器，具有良好的波长控制

    公开(公告)号：US06192064B1

    公开(公告)日：2001-02-20

    申请号：US09470724

    申请日：1999-12-22

    申请人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    发明人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    IPC分类号： H01S308

    CPC分类号： G03F7/70025 ,  G02B5/1828 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/08081 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.

    摘要翻译： 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。 通过控制放电电压来控制脉冲能量。 通过在线窄模块中的RMAX镜子的非常精细和快速的定位来控制波长。 带宽是通过调整线窄化模块中的光栅的曲率来控制的。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。 其它优选实施例包括在谐振腔内自动调整激光室的水平位置。 在优选实施例中，使用来自波长监视器的反馈信号来定位RMAX镜。 在其它优选实施例中，使用从RMAX镜反射到光电二极管阵列上的分离的激光束来定位反射镜。

    Narrow band excimer laser with gas additive
    9.
    发明授权
    Narrow band excimer laser with gas additive 失效
    窄带准分子激光与气体添加剂

    公开(公告)号：US6014398A

    公开(公告)日：2000-01-11

    申请号：US082139

    申请日：1998-05-20

    申请人： Thomas Hofmann ,  Toshihiko Ishihara ,  Palash P. Das ,  Alexander I. Ershov

    发明人： Thomas Hofmann ,  Toshihiko Ishihara ,  Palash P. Das ,  Alexander I. Ershov

    IPC分类号： H01S3/038 ,  G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/225 ,  H01S3/22

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/08009 ,  H01S3/2251 ,  H01S3/2256

    摘要： The present invention provides a very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. Very small quantities of a stablizing additive consisting of oxygen or a heavy noble gas (xenon or radon for KrF lasers, or krypton, xenon or radon for ArF lasers), are added to the gas mixture. Tests performed show substantial improvements in energy stability with the addition of about 30 ppm of xenon to a KrF laser. Tests show improved performance for the ArF lasers with the addition of about 6-10 ppm of Xe or 40 ppm of Kr. In a preferred embodiment very narrow bandwidth is achieved on a KrF laser by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line-narrowing module were replaced with calcium fluoride prisms.

    摘要翻译： 本发明提供了一种非常窄带脉冲准分子激光器，其能够以增加的能量剂量控制和再现性以大约500至2000Hz范围内的速率产生脉冲。 将非常少量由氧气或重稀有气体（用于KrF激光器的氙气或氪气，或用于ArF激光器的氪气，氙气或氡气）组成的稳定添加剂加入气体混合物中。 进行的测试显示出能量稳定性的显着改善，其中向KrF激光器添加约30ppm的氙。 测试表明，ArF激光器的性能提高了约6-10ppm的Xe或40ppm的Kr。 在一个优选实施例中，通过将氟分压降低到小于0.10％，并通过将输出耦合器的反射率提高到大于25％，在KrF激光器上实现非常窄的带宽。 在一个优选实施例中，现有技术的线缩窄模块中使用的现有技术的熔融石英束膨胀棱镜被氟化钙棱镜代替。