发明授权
- 专利标题： Acoustic transducers and method of microfabrication
- 专利标题（中）： 声学传感器和微细加工方法
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申请号： US52818申请日： 1998-03-31
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公开(公告)号： US5982709A公开(公告)日： 1999-11-09
- 发明人: Igal Ladabaum , Xuecheng Jin , Butrus T. Khuri-Yakub
- 申请人： Igal Ladabaum , Xuecheng Jin , Butrus T. Khuri-Yakub
- 申请人地址： CA Palo Alto
- 专利权人： The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人： The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址： CA Palo Alto
- 主分类号： H01L41/09
- IPC分类号： H01L41/09 ; H04R17/00
摘要：
There is provided an acoustic transducer which includes a membrane of selected size and shape supported at its edges spaced from a first conductive electrode by an integral support structure with the second conductive electrode comprising a thin metal film on the membrane. The active membrane area is undisturbed by etch vias.
公开/授权文献
- USD380894S Axillary support for an axillary clutch 公开/授权日：1997-07-15
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