Invention Grant
US5983721A Micromechanical component having closely spaced apart anchoring areas
for a surface structure disposed thereon
失效
微机械部件具有紧密间隔开的锚定区域，用于设置在其上的表面结构
- Patent Title: Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon
- Patent Title (中): 微机械部件具有紧密间隔开的锚定区域，用于设置在其上的表面结构
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Application No.: US940140Application Date: 1997-09-29
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Publication No.: US5983721APublication Date: 1999-11-16
- Inventor: Peter Sulzberger , Michael Offenberg
- Applicant: Peter Sulzberger , Michael Offenberg
- Applicant Address: DEX Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DEX Stuttgart
- Priority: DEX19639946 19960927
- Main IPC: G01L1/14
- IPC: G01L1/14 ; B81B3/00 ; B81B7/00 ; B81C1/00 ; G01P15/08 ; G01P15/125
Abstract:
A micromechanical component includes a one-piece surface structure that is created on a substrate. The one-piece surface structure is attached to the surface of the substrate by at least two anchoring areas. The anchoring areas are a small distance apart, which is comparatively small in comparison with the lateral dimension of the surface structure. The surface structure has movable electrodes. Opposite them there are rigid electrodes that are attached to the substrate by additional anchoring areas. The additional anchoring areas also have a small distance between one another and to the anchoring areas.
Public/Granted literature
- US4807683A Retractable screen Public/Granted day:1989-02-28
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