发明授权
US5985718A Process for fabricating memory cells with two levels of polysilicon for devices of EEPROM type 失效
用于制造具有两种级别的多晶硅用于EEPROM类型的器件的存储器单元的工艺

Process for fabricating memory cells with two levels of polysilicon for
devices of EEPROM type
摘要:
A process for fabricating a memory cell having two levels of polysilicon and being included in a memory device of the EEPROM type, wherein the device is formed on a semiconductor material substrate which has a first conductivity type. The process comprises the steps of forming, on the substrate a thin tunnel oxide region surrounded by a gate oxide region previously formed on the same substrate, depositing a layer of polycrystalline silicon over the gate oxide region and the thin tunnel oxide region, and successively depositing a composite ONO layer and an additional polysilicon layer over the polycrystalline silicon layer. A capacitive implant mask having a window is formed by depositing a layer of a light-sensitive material over the additional polysilicon layer, a dopant is implanted through the window at an energy and with dosages effective to penetrate the polycrystalline silicon, ONO, and polysilicon layers, respectively, and a region of electric continuity is formed laterally and beneath the thin tunnel oxide region.
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