发明授权
US5985718A Process for fabricating memory cells with two levels of polysilicon for
devices of EEPROM type
失效
用于制造具有两种级别的多晶硅用于EEPROM类型的器件的存储器单元的工艺
- 专利标题: Process for fabricating memory cells with two levels of polysilicon for devices of EEPROM type
- 专利标题(中): 用于制造具有两种级别的多晶硅用于EEPROM类型的器件的存储器单元的工艺
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申请号: US996922申请日: 1997-12-23
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公开(公告)号: US5985718A公开(公告)日: 1999-11-16
- 发明人: Giovanna Dalla Libera , Bruno Vajana , Roberta Bottini , Carlo Cremonesi
- 申请人: Giovanna Dalla Libera , Bruno Vajana , Roberta Bottini , Carlo Cremonesi
- 申请人地址: ITX Agrate Brianza
- 专利权人: SGS-Thomson Microelectronics S.r.l.
- 当前专利权人: SGS-Thomson Microelectronics S.r.l.
- 当前专利权人地址: ITX Agrate Brianza
- 优先权: ITXMI96A2742 19961224
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8247
摘要:
A process for fabricating a memory cell having two levels of polysilicon and being included in a memory device of the EEPROM type, wherein the device is formed on a semiconductor material substrate which has a first conductivity type. The process comprises the steps of forming, on the substrate a thin tunnel oxide region surrounded by a gate oxide region previously formed on the same substrate, depositing a layer of polycrystalline silicon over the gate oxide region and the thin tunnel oxide region, and successively depositing a composite ONO layer and an additional polysilicon layer over the polycrystalline silicon layer. A capacitive implant mask having a window is formed by depositing a layer of a light-sensitive material over the additional polysilicon layer, a dopant is implanted through the window at an energy and with dosages effective to penetrate the polycrystalline silicon, ONO, and polysilicon layers, respectively, and a region of electric continuity is formed laterally and beneath the thin tunnel oxide region.
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