- 专利标题: Method of efficiently laser marking singulated semiconductor devices
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申请号: US897774申请日: 1997-07-21
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公开(公告)号: US5986235A公开(公告)日: 1999-11-16
- 发明人: Robert L. Canella
- 申请人: Robert L. Canella
- 申请人地址: ID Nampa
- 专利权人: Micron Electronics, Inc.
- 当前专利权人: Micron Electronics, Inc.
- 当前专利权人地址: ID Nampa
- 主分类号: B23K26/08
- IPC分类号: B23K26/08 ; G06K1/12 ; H01L21/00 ; H01L23/544 ; B23K26/00
摘要:
A laser marking apparatus and method for marking the surface of a singulated article such as a semiconductor chip are described herein. Semiconductor chips are fed along inclined, parallel tracks to a laser marking field where they are subsequently marked by a laser beam. As the laser beam is marking chips associated with one track, chips associated with other tracks that have already been marked are replaced by unmarked chips. In this manner, the laser is continually being used to mark semiconductor chips without having to wait for unmarked chips to move to the marking location.
公开/授权文献
- US5297078A Static semiconductor memory device for stable operation 公开/授权日:1994-03-22
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