发明授权
- 专利标题： Smooth diamond films as low friction, long wear surfaces
- 专利标题（中）： 平滑的金刚石薄膜作为低摩擦，长的磨损表面
-
申请号： US620932申请日： 1996-03-22
-
公开(公告)号： US5989511A公开(公告)日： 1999-11-23
- 发明人: Dieter M. Gruen , Alan R. Krauss , Ali Erdemir , Cuma Bindal , Christopher D. Zuiker
- 申请人： Dieter M. Gruen , Alan R. Krauss , Ali Erdemir , Cuma Bindal , Christopher D. Zuiker
- 申请人地址： IL Chicago
- 专利权人： The University of Chicago
- 当前专利权人： The University of Chicago
- 当前专利权人地址： IL Chicago
- 主分类号： C01B31/06
- IPC分类号： C01B31/06 ; C23C14/06 ; C23C14/22 ; C23C16/27 ; C23C16/448 ; C30B23/00 ; C30B23/02 ; C30B25/10 ; C30B33/00 ; H01J9/02 ; C30B29/04
摘要：
An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.
信息查询
