发明授权
- 专利标题： Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal
- 专利标题（中）： 响应于电信号定位泵的限流器屏蔽的方法和装置
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申请号： US855827申请日： 1997-05-12
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公开(公告)号： US6000415A公开(公告)日： 1999-12-14
- 发明人: David Datong Huo , Bret W. Adams , John Jarvis
- 申请人： David Datong Huo , Bret W. Adams , John Jarvis
- 申请人地址： CA Santa Clara IL Schaumberg
- 专利权人： Applied Materials, Inc.,Motorala, Inc.
- 当前专利权人： Applied Materials, Inc.,Motorala, Inc.
- 当前专利权人地址： CA Santa Clara IL Schaumberg
- 主分类号： F04B37/16
- IPC分类号： F04B37/16 ; F04B37/08 ; F16K51/00 ; H01L21/00
摘要：
Apparatus, positioned at an inlet port to a pump, for shielding the pump from a process chamber of a semiconductor wafer processing system, where the apparatus has a controllably variable effective throughput area, and method for electrically controlling the size of the effective throughput area. Specifically, the apparatus is a controllable restrictor shield supported by an actuator, having a first effective throughput area and a second effective throughput area, where the first effective throughput area is typically less than the second effective throughput area. The size of the effective throughput area is directly responsive to an electric signal that controls the actuator.
公开/授权文献
- US5190447A Hydraulic pump with integral electric motor 公开/授权日：1993-03-02
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