发明授权
- 专利标题: Piezoresistive pressure sensor with sculpted diaphragm
- 专利标题(中): 压电式压力传感器,带雕刻膜片
-
申请号: US144118申请日: 1998-08-31
-
公开(公告)号: US6006607A公开(公告)日: 1999-12-28
- 发明人: Janusz Bryzek , David W. Burns , Sean S. Cahill , Steven S. Nasiri , James B. Starr
- 申请人: Janusz Bryzek , David W. Burns , Sean S. Cahill , Steven S. Nasiri , James B. Starr
- 申请人地址: CA Sunnyvale
- 专利权人: Maxim Integrated Products, Inc.
- 当前专利权人: Maxim Integrated Products, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L9/06
摘要:
The present invention is a semiconductor pressure sensor. In one embodiment, the semiconductor pressure sensor includes a diaphragm having a first thickness and at least cone raised boss that is coupled to a first side of the diaphragm. The at least one raised boss increases the diaphragm thickness in the region occupied by the at least one raised boss to a second thickness. A plurality of piezoresistors are disposed on a second side of the diaphragm in regions of the first thickness. In another embodiment, a semiconductor pressure sensor diaphragm includes at least one raised boss disposed along a central axis on a first side of the diaphragm. At least two raised bridge regions are disposed along the central axis, interconnecting the at least one raised boss and a diaphragm edge. Each raised bridge region is narrower than the raised boss. A plurality of piezoresistors are disposed on the raised bridge regions of the diaphragm along the central axis.
公开/授权文献
- US4322179A Open top drain 公开/授权日:1982-03-30
信息查询