发明授权
- 专利标题: Chamber interfacing O-rings and method for implementing same
- 专利标题(中): 室连接O型圈及其实现方法
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申请号: US883951申请日: 1997-06-27
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公开(公告)号: US6010133A公开(公告)日: 2000-01-04
- 发明人: Trace L. Boyd , Richard D. Beer , Eric A. Terbeek , Vernon W. H. Wong
- 申请人: Trace L. Boyd , Richard D. Beer , Eric A. Terbeek , Vernon W. H. Wong
- 申请人地址: CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: CA Fremont
- 主分类号: F16J15/02
- IPC分类号: F16J15/02 ; H01J37/18 ; H01L21/00 ; H01L21/677 ; F16J15/00
摘要:
Disclosed is a method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber. The transport chamber being configured to mate with the another chamber in an adjacent relationship. The method includes placing an insert plate having a sealing surface containing a first O-ring into the transport chamber interface port such that the first O-ring is sandwiched between the sealing surface and a surface of the another chamber. Therefore, a vacuum seal is achieved between the transport chamber and the another chamber within the transport chamber interface port via the first O-ring.
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