发明授权
- 专利标题： Fluorine-containing silicon network polymer, insulating coating thereof, and electronic devices therewith
- 专利标题（中）： 含氟硅网络聚合物，其绝缘涂层及其电子器件
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申请号： US945472申请日： 1997-10-27
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公开(公告)号： US6015596A公开(公告)日： 2000-01-18
- 发明人: Takao Miwa , Akira Watanabe , Osamu Ito , Minoru Matsuda
- 申请人： Takao Miwa , Akira Watanabe , Osamu Ito , Minoru Matsuda
- 申请人地址： JPX Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX7-099228 19950425; JPX7-181416 19950718
- 主分类号： C08G77/60
- IPC分类号： C08G77/60 ; H01L21/312 ; H01L21/316 ; C08J7/18
摘要：
A fluorosilicon network polymer prepared by the reaction of a tetraholosilane of the formula 1: SiX4 with an organohologen compound of the formula 2: RZ , an insulating coating prepared therefrom, semiconductor devices coated therewith, and processes for producing the same. In said formulas, R represents at least monofluorinated alkyl or aryl; and X and Z represent each independently boromine, iodine or chlorine.
公开/授权文献
- US4248031A Stretch wrap machine 公开/授权日：1981-02-03
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