发明授权
- 专利标题: Mosaic polishing pads and methods relating thereto
- 专利标题(中): 马赛克抛光垫及其相关方法
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申请号: US74667申请日: 1998-05-08
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公开(公告)号: US6019666A公开(公告)日: 2000-02-01
- 发明人: John V. H. Roberts , Lee Melbourne Cook , David B. James , Heinz F. Reinhardt
- 申请人: John V. H. Roberts , Lee Melbourne Cook , David B. James , Heinz F. Reinhardt
- 申请人地址: DE Newark
- 专利权人: Rodel Holdings Inc.
- 当前专利权人: Rodel Holdings Inc.
- 当前专利权人地址: DE Newark
- 主分类号: B24B37/26
- IPC分类号: B24B37/26 ; B24B41/047 ; B24D7/06 ; B24D13/14 ; B24D99/00 ; B24B1/00
摘要:
This invention provides polishing pad tiles which, by virtue of their geometry and surface features, can be arranged to form mosaic pads having channels at the seams which facilitate the flow of polishing fluid during polishing of a workpiece.
公开/授权文献
- USD407119S Rotatable card holder 公开/授权日:1999-03-23