- 专利标题: Apparatus for and method of polishing workpiece
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申请号: US728070申请日: 1996-10-09
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公开(公告)号: US6033520A公开(公告)日: 2000-03-07
- 发明人: Norio Kimura , Hozumi Yasuda
- 申请人: Norio Kimura , Hozumi Yasuda
- 申请人地址: JPX Tokyo
- 专利权人: Ebara Corporation
- 当前专利权人: Ebara Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-287976 19951009; JPX8-050956 19960214
- 主分类号: B24B37/005
- IPC分类号: B24B37/005 ; B24B37/04 ; B24B37/30 ; B24B37/32 ; C23F1/02
摘要:
A polishing apparatus for polishing a workpiece such as a semiconductor wafer has a turntable with an abrasive cloth mounted on an upper surface thereof, and a top ring for holding a workpiece and pressing the workpiece against the abrasive cloth under a first pressing force to polish the workpiece. A guide ring is vertically movably disposed around the top ring, and pressed against the abrasive cloth under a variable second pressing force. The first and second pressing forces are variable independently of each other, and the second pressing force is determined based on the first pressing force.
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