发明授权
- 专利标题: Method of fabricating flat FED screens
- 专利标题(中): 平面FED屏幕的制作方法
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申请号: US942477申请日: 1997-10-02
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公开(公告)号: US6036566A公开(公告)日: 2000-03-14
- 发明人: Livio Baldi , Maria Santina Marangon
- 申请人: Livio Baldi , Maria Santina Marangon
- 申请人地址: ITX Agrate
- 专利权人: SGS-Thomson Microelectronics S.R.L.
- 当前专利权人: SGS-Thomson Microelectronics S.R.L.
- 当前专利权人地址: ITX Agrate
- 优先权: EPX96830509 19961004
- 主分类号: H01J1/304
- IPC分类号: H01J1/304 ; H01J9/02 ; H01J29/04 ; H01J31/12 ; H01L29/66
摘要:
The microtips of charge emitting material, which define the cathode of the flat FED screen and face the grid of the screen, are tubular and have portions with a small radius of curvature. The microtips are obtained by forming openings in the dielectric layer separating the cathode connection layer from the grid layer, depositing a conducting material layer to cover the walls of the openings, and anisotropically etching the layer of conducting material to form inwardly-inclined surfaces with emitting tips. Subsequently, the portions of the dielectric layer surrounding the microtips are removed.
公开/授权文献
- US5312386A Disposable sanitary pad 公开/授权日:1994-05-17