发明授权
- 专利标题: Method for producing a DRAM cellular arrangement
- 专利标题(中): 用于制造DRAM蜂窝装置的方法
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申请号: US254696申请日: 1999-03-15
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公开(公告)号: US6037209A公开(公告)日: 2000-03-14
- 发明人: Wolfgang Rosner , Lothar Risch , Franz Hofmann , Reinhard Stengl
- 申请人: Wolfgang Rosner , Lothar Risch , Franz Hofmann , Reinhard Stengl
- 申请人地址: DEX Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Munich
- 优先权: DEX19637389 19960913
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242 ; H01L27/108
摘要:
The DRAM cell arrangement comprises, per memory cell, a vertical MOS transistor whose first source/drain region is connected to a storage node of a storage capacitor, whose channel region (3) is annularly enclosed by a gate electrode (13) and whose second source/drain region is connected to a buried bit line. The DRAM cell arrangement is produced using only two masks, with the aid of a spacer technique, with a memory cell area of 2F.sup.2, where F is the minimum structure size which can be produced using the respective technology.
公开/授权文献
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