发明授权
- 专利标题： Multiple metallization structure for a reflection type liquid crystal display
- 专利标题（中）： 用于反射型液晶显示器的多金属化结构
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申请号： US893671申请日： 1997-07-11
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公开(公告)号： US6049132A公开(公告)日： 2000-04-11
- 发明人: Masanori Iwahashi , Makoto Mizuno , Koji Hanihara
- 申请人： Masanori Iwahashi , Makoto Mizuno , Koji Hanihara
- 申请人地址： JPX Kobe JPX Tokyo JPX Yamanashi
- 专利权人： Kawasaki Steel Corporation,Pioneer Electronic Corporation,Pioneer Video Corporation
- 当前专利权人： Kawasaki Steel Corporation,Pioneer Electronic Corporation,Pioneer Video Corporation
- 当前专利权人地址： JPX Kobe JPX Tokyo JPX Yamanashi
- 优先权： JPX8-183152 19960712; JPX8-189037 19960718
- 主分类号： G02F1/1362
- IPC分类号： G02F1/1362 ; H01L23/532 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要：
In a semiconductor chip for Si chip based liquid crystal having insulating films and interconnection layers formed on a semiconductor substrate, a thin interconnection layer made of TiN/Ti having strong erosion resistance is formed on an uppermost interlayer insulating film having a flat surface to substantially expose the thin uppermost interconnection layer to the surface of the chip, the uppermost insulating film is covered with a protection film made of p-SiN and a thin insulating film having a mirror-like flat surface is formed on the uppermost interconnection layer.
公开/授权文献
- US5491999A Gripper means for stretcher leveler apparatus 公开/授权日：1996-02-20
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