发明授权
- 专利标题： Surface shape recognition sensor and method of fabricating the same
- 专利标题（中）： 表面形状识别传感器及其制造方法
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申请号： US263678申请日： 1999-03-05
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公开(公告)号： US6060756A公开(公告)日： 2000-05-09
- 发明人: Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura , Akihiko Hirata
- 申请人： Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura , Akihiko Hirata
- 申请人地址： JPX Tokyo
- 专利权人： Nippon Telegraph and Telephone Corporation
- 当前专利权人： Nippon Telegraph and Telephone Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX10-053911 19980305; JPX10-135036 19980518; JPX11-001170 19990106
- 主分类号： G01B7/004
- IPC分类号： G01B7/004 ; G01B7/34 ; G06K9/00 ; H01L29/82 ; H01L31/0203 ; H01L31/0232
摘要：
A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.
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