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公开(公告)号：US06248655B1
公开(公告)日：2001-06-19
申请号：US09515962
申请日：2000-02-29
IPC分类号： H01L2144
CPC分类号： G06K9/0002 , G01B7/004 , G01B7/34
摘要： A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.
摘要翻译： 本发明的表面形状识别传感器至少包括多个电容检测元件，该电容检测元件具有布置在形成于半导体衬底上的层间电介质膜上的同一平面内的绝缘/隔离的电容检测元件，用于检测 电容检测元件的电容和设置在层间电介质膜上的与传感器电极绝缘/隔离的固定电极。 当待识别的物体接触固定电极的上表面时，由电容检测元件检测的电容根据上表面上的凹凸来改变。
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公开(公告)号：US06438257B1
公开(公告)日：2002-08-20
申请号：US09347240
申请日：1999-07-02
IPC分类号： G06K900
CPC分类号： G01R27/2605 , G06K9/0002 , G11C11/24 , G11C27/028
摘要： A small capacitance change detection device includes a capacitance detection element, signal generation circuit, signal amplification circuit, and output circuit. The signal amplification circuit includes a first transistor and first to third voltage sources. The second or third voltage source is connected to the other output terminal of the first transistor via a first switch. A voltage to be applied from the second voltage source to the other output terminal is set to have a value equal to or larger than a value obtained by subtracting a threshold voltage of the first transistor from a voltage of the first voltage source while a voltage to be applied from the third voltage source to the other output terminal is set to have a value equal to or smaller than a value obtained by subtracting the threshold voltage from the voltage of the first voltage source. The output circuit is connected to a connection point between the other output terminal of the first transistor and the first switch and, after a voltage of the second or third voltage source is applied to the connection point in an ON state of the first switch, receives the voltage at the connection point on the basis of an OFF state of the first switch and charge control by the signal generation circuit after the first switch is turned off.
摘要翻译： 小电容变化检测装置包括电容检测元件，信号生成电路，信号放大电路和输出电路。 信号放大电路包括第一晶体管和第一至第三电压源。 第二或第三电压源通过第一开关连接到第一晶体管的另一个输出端。 将从第二电压源施加到另一输出端子的电压设定为等于或大于从第一电压源的电压减去第一晶体管的阈值电压而获得的值，同时将电压 从第三电压源施加到另一输出端子的值设定为等于或小于从第一电压源的电压减去阈值电压获得的值。 输出电路连接到第一晶体管的另一输出端和第一开关之间的连接点，并且在第二或第三电压源的电压施加到第一开关的接通状态的连接点之后，接收 基于第一开关的OFF状态的连接点处的电压和在第一开关之后的信号发生电路的充电控制被断开。
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公开(公告)号：US6060756A
公开(公告)日：2000-05-09
申请号：US263678
申请日：1999-03-05
IPC分类号： G01B7/004 , G01B7/34 , G06K9/00 , H01L29/82 , H01L31/0203 , H01L31/0232
CPC分类号： G06K9/0002 , G01B7/004 , G01B7/34
摘要： A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.
摘要翻译： 本发明的表面形状识别传感器至少包括多个电容检测元件，该电容检测元件具有布置在形成于半导体衬底上的层间电介质膜上的同一平面内的绝缘/隔离的电容检测元件，用于检测 电容检测元件的电容和设置在层间电介质膜上的与传感器电极绝缘/隔离的固定电极。 当待识别的物体接触固定电极的上表面时，由电容检测元件检测的电容根据上表面上的凹凸来改变。
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公开(公告)号：US20060034493A1
公开(公告)日：2006-02-16
申请号：US10520879
申请日：2004-08-12
申请人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
发明人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
IPC分类号： G06K9/00
CPC分类号： G06K9/0012 , A61B5/0531 , A61B5/1172 , A61B5/6826 , A61B5/6838 , G06K9/00899
摘要： A response signal generating unit (3) applies a predetermined supply signal (2S) to a detection element (1) and outputs, as a response signal (3S), a signal which has changed in accordance with the impedance of an object (10) with which the unit is in contact through the detection element (1). A waveform information detection unit (4) detects waveform information corresponding to the impedance of the object (10) on the basis of the response signal (3S) from the response signal generating unit (3), and outputs a detection signal (4S) representing the waveform information. A biometric recognition unit (5) determines on the basis of the detection signal (4S) from the waveform information detection unit (4) whether or not the object (10) is a living body.
摘要翻译： 响应信号生成单元（3）将预定的供给信号（2S）施加到检测元件（1），并输出根据对象的阻抗而变化的信号作为响应信号（3S） 10），其通过检测元件（1）与单元接触。 波形信息检测单元（4）根据来自响应信号生成单元（3）的响应信号（3 S）检测与物体（10）的阻抗相对应的波形信息，并输出检测信号（4S ）表示波形信息。 生物识别单元（5）根据来自波形信息检测单元（4）的检测信号（4S）确定物体（10）是否为活体。
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公开(公告)号：US06714666B1
公开(公告)日：2004-03-30
申请号：US09590879
申请日：2000-06-09
IPC分类号： G06K900
CPC分类号： G06K9/0002
摘要： A surface shape recognition apparatus includes a plurality of sensor electrodes, passivation film, capacitance detection circuit, and ground electrode. The sensor electrodes are formed on an interlevel insulator on a substrate and insulated from each other. The passivation film is formed on the interlevel insulator to cover the upper and side surfaces of each sensor electrode. The passivation film is formed from a dielectric material. When a target recognition object comes into contact with the surface of the passivation film, the capacitance detection circuit detects an electrostatic capacitance formed between the sensor electrode and the surface of the target recognition object opposing the sensor electrode. The ground electrode passes static electricity on the surface of the passivation film.
摘要翻译： 表面形状识别装置包括多个传感器电极，钝化膜，电容检测电路和接地电极。 传感器电极形成在基板上的层间绝缘体上并彼此绝缘。 钝化膜形成在层间绝缘体上以覆盖每个传感器电极的上表面和侧表面。 钝化膜由电介质材料形成。 当目标识别对象与钝化膜的表面接触时，电容检测电路检测在传感器电极与与传感器电极相对的目标识别对象的表面之间形成的静电电容。 接地电极在钝化膜的表面上传递静电。
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公开(公告)号：US07548636B2
公开(公告)日：2009-06-16
申请号：US10520879
申请日：2004-08-12
申请人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
发明人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
CPC分类号： G06K9/0012 , A61B5/0531 , A61B5/1172 , A61B5/6826 , A61B5/6838 , G06K9/00899
摘要： A response signal generating unit (3) applies a predetermined supply signal (2S) to a detection element (1) and outputs, as a response signal (3S), a signal which has changed in accordance with the impedance of an object (10) with which the unit is in contact through the detection element (1). A waveform information detection unit (4) detects waveform information corresponding to the impedance of the object (10) on the basis of the response signal (3S) from the response signal generating unit (3), and outputs a detection signal (4S) representing the waveform information. A biometric recognition unit (5) determines on the basis of the detection signal (4S) from the waveform information detection unit (4) whether or not the object (10) is a living body.
摘要翻译： 响应信号生成单元（3）向检测元件（1）施加预定的供给信号（2S），作为响应信号（3S）输出根据物体（10）的阻抗而变化的信号， 单元通过检测元件（1）与其接触。 波形信息检测单元（4）根据来自响应信号生成单元（3）的响应信号（3S）检测与物体（10）的阻抗相对应的波形信息，并输出表示 波形信息。 生物识别单元（5）根据来自波形信息检测单元（4）的检测信号（4S）确定物体（10）是否为生物体。
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公开(公告)号：US07360293B2
公开(公告)日：2008-04-22
申请号：US11102269
申请日：2005-04-07
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
IPC分类号： G01R3/00
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.
摘要翻译： 一种制造表面形状识别传感器的方法。 牺牲膜形成在层间电介质上以覆盖下电极，同时保持支撑电极的上部暴露。 在牺牲膜和支撑电极上形成上电极。 选择性地除去牺牲膜，并在上电极上形成保护膜。 在保护膜上形成具有感光性的感光性树脂膜。 在电容检测元件上方的保护膜的区域中形成有多个突起。 以这种方式形成多个具有下电极和上电极的电容检测元件。
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公开(公告)号：US07123026B2
公开(公告)日：2006-10-17
申请号：US10052640
申请日：2002-01-18
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A surface shape recognition sensor includes capacitive detection elements, support electrode, protective film, and projections. The detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The projections per one pixel are laid out in a region of the protective film above the capacitive detection element.
摘要翻译： 表面形状识别传感器包括电容性检测元件，支撑电极，保护膜和突起。 检测元件由下电极和由金属制成的可变形的板状上电极形成。 下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。 上电极以预定间隔布置在下电极上方并具有开口部分。 支撑电极围绕下电极布置，同时与下电极绝缘和隔离，并且形成为高于下电极以支撑上电极。 保护膜形成在上电极上以封闭开口部分。 每个像素的突起布置在电容检测元件上方的保护膜的区域中。
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公开(公告)号：US20060057756A1
公开(公告)日：2006-03-16
申请号：US10512757
申请日：2004-02-13
CPC分类号： G06K9/0002 , Y10S438/942
摘要： A structure (113b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode (110b) is formed on the upper electrode (110a) in a region above each lower electrode 105a in one-to-one correspondence with the lower electrode (105a). An object of surface shape sensing, e.g., the tip of a finger (1602) touches the surface of the overhang of the structure (113b), and the support portion of the structure (113b) whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode (110a) toward the lower electrode (105a), thereby deforming the upper electrode (110a).
摘要翻译： 1.一种结构（113b），其包括突出端和支撑部分，所述支撑部分基本上支撑所述突出部的中心，并且所述支撑部分的面积小于所述上部电极的二维方向上的所述突出部分的面积（ 110b）在每个下电极105a的上方的区域中形成在上电极（110a）上，与下电极（105a）一一对应地形成。 表面形状检测的目的，例如手指的尖端（1602）接触结构（113b）的突出部分的表面，并且结构（113b）的支撑部分（113b）的突出部与物体接触 的感测将上部电极（110a）的一部分朝向下部电极（105a）下压，从而使上部电极（110a）变形。
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公开(公告)号：US20050259850A1
公开(公告)日：2005-11-24
申请号：US10528283
申请日：2004-08-12
申请人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
发明人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
CPC分类号： G06K9/0002 , G06K9/0012
摘要： A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).
摘要翻译： 具有连接到表面形状检测单元（2）的检测电极（11A）和与公共电位连接的检测电极（12A）的检测元件（1A）和具有检测元件 连接到表面形状检测单元（2）的电极（11B）和连接到生物识别单元（3）的检测电极（12B）。 表面形状检测单元（2）基于从检测元件（1A，1B）获得的各个电容，将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。 生物识别单元（3）基于与检测元件（1）的检测电极（12B）之间连接的物体（9）的阻抗相对应的信号来判定物体（9）是活体， B）和检测元件（1A）的检测电极（12A）。
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