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US6063453A Method of manufacturing electron-emitting device and image-forming apparatus comprising such devices 失效
制造电子发射器件的方法和包括这种器件的成像设备

Method of manufacturing electron-emitting device and image-forming
apparatus comprising such devices
摘要:
An electron-emitting device having an electroconductive film including an electron-emitting region and arranged between a pair of electrodes is manufactured by forming an electroconductive film on a substrate and producing an electron-emitting region in the electroconductive film. The electroconductive film is formed on the substrate by heating the substrate in an atmosphere containing a gasified organic metal compound to a temperature higher than the decomposition of the gasified organic metal compound.
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