发明授权
US6063681A Silicide formation using two metalizations 失效
使用两种金属化的硅化物形成

  • 专利标题: Silicide formation using two metalizations
  • 专利标题(中): 使用两种金属化的硅化物形成
  • 申请号: US118823
    申请日: 1998-07-20
  • 公开(公告)号: US6063681A
    公开(公告)日: 2000-05-16
  • 发明人: Jeong Hwan Son
  • 申请人: Jeong Hwan Son
  • 申请人地址: KRX Chungcheongbuk-do
  • 专利权人: LG Semicon Co., Ltd.
  • 当前专利权人: LG Semicon Co., Ltd.
  • 当前专利权人地址: KRX Chungcheongbuk-do
  • 优先权: KRX98/738 19980113
  • 主分类号: H01L21/285
  • IPC分类号: H01L21/285 H01L21/336
Silicide formation using two metalizations
摘要:
Semiconductor device and method for fabricating the same, is disclosed, in which LDD regions and source/drain regions are provided with a silicide for reducing resistances to prevent short channel, the device including a gate insulating film and a gate electrode formed stacked on a prescribed region of a semiconductor substrate, sidewall spacers formed at both sides of the gate insulating film and the gate electrode, first impurity regions formed in surfaces of the semiconductor substrate under the sidewall spacers, second impurity regions formed in the semiconductor substrate on both sides of the sidewall spacers and the first impurity regions, first silicide films at surfaces of the first impurity regions, and second silicide films at surfaces of the gate electrode and the second impurity regions.
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