发明授权
- 专利标题: Method of making an integrated optical component and an integrated optical star coupler made in accordance with said method
- 专利标题(中): 根据所述方法制造集成光学部件和集成光学星形耦合器的方法
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申请号: US352409申请日: 1999-07-14
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公开(公告)号: US6067388A公开(公告)日: 2000-05-23
- 发明人: Norbert Fabricius , Wolfgang Foss , Martin Wolff , Uwe Hollenbach , Uwe Seiberth
- 申请人: Norbert Fabricius , Wolfgang Foss , Martin Wolff , Uwe Hollenbach , Uwe Seiberth
- 申请人地址: DEX Waghausel
- 专利权人: IOT Integrierte Optik GmbH
- 当前专利权人: IOT Integrierte Optik GmbH
- 当前专利权人地址: DEX Waghausel
- 优先权: DEX19609289 19960309
- 主分类号: G02B6/122
- IPC分类号: G02B6/122 ; B01J47/00 ; C03C15/00 ; G02B6/12 ; G02B6/125 ; G02B6/13 ; G02B6/34
摘要:
The invention is directed to a method for making integrated optical components having strip waveguides (11 to 15; 21 to 2M) and a layer waveguide 53. A mask 4 having a lattice structure 3i functions to generate the layer waveguide 53 via ion exchange. The method of the invention is suitable for making couplers having free spaces with low attenuation and is especially suitable for arrayed waveguide grating multiplexers. The invention also is directed to an integrated optical component made pursuant to the method of the invention.
公开/授权文献
- US4962836A Fluid friction clutch 公开/授权日:1990-10-16
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