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US6067388A Method of making an integrated optical component and an integrated optical star coupler made in accordance with said method 失效
根据所述方法制造集成光学部件和集成光学星形耦合器的方法

Method of making an integrated optical component and an integrated
optical star coupler made in accordance with said method
摘要:
The invention is directed to a method for making integrated optical components having strip waveguides (11 to 15; 21 to 2M) and a layer waveguide 53. A mask 4 having a lattice structure 3i functions to generate the layer waveguide 53 via ion exchange. The method of the invention is suitable for making couplers having free spaces with low attenuation and is especially suitable for arrayed waveguide grating multiplexers. The invention also is directed to an integrated optical component made pursuant to the method of the invention.
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