发明授权
- 专利标题: Apparatus and method for calibrating a polishing head
- 专利标题(中): 用于校准抛光头的装置和方法
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申请号: US323343申请日: 1999-06-01
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公开(公告)号: US6068544A公开(公告)日: 2000-05-30
- 发明人: Chen-Chia Chiu , Fang-Lin Lu , Kuo-Pao Yeh , Yu-Sheng Shen
- 申请人: Chen-Chia Chiu , Fang-Lin Lu , Kuo-Pao Yeh , Yu-Sheng Shen
- 申请人地址: TWX Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: B24B37/34
- IPC分类号: B24B37/34 ; B24B41/047 ; B24B7/00
摘要:
An apparatus for calibrating the centering of polishing heads in a polishing machine that is equipped with a plurality of spindles onto which polishing heads are mounted and a method for using such apparatus are disclosed. In the apparatus, a calibration disc is provided which has a hollow shaft mounted at a center of the bottom surface of the disc. A centering pin slidingly engaging an elongated cavity in the hollow shaft such that its protruded tip portion may be adjusted by using a locking device such as a set screw for different calibration procedures. The present invention novel apparatus can be used to calibrate the positioning of a polishing head mounted in a spindle with a pedestal in a load cup that is equipped with a center alignment aperture. The calibration can be conducted not only in the X, Y direction (or in the circumferential direction) of the spindle movement, but also in the Z direction (or a sweep direction) of the traversing spindle that occurs during a polishing operation.
公开/授权文献
- US4890866A Tubing connector 公开/授权日:1990-01-02
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