Invention Grant
- Patent Title: Pedestal insulator for a pre-clean chamber
- Patent Title (中): 用于预清洁室的基座绝缘子
-
Application No.: US88759Application Date: 1998-06-02
-
Publication No.: US6077353APublication Date: 2000-06-20
- Inventor: Mohamed A. Al-Sharif , Bradley O. Stimson , Debabrata Ghosh , Barney M. Cohen , Kenny King-Tai Ngan , Murali Narasimhan
- Applicant: Mohamed A. Al-Sharif , Bradley O. Stimson , Debabrata Ghosh , Barney M. Cohen , Kenny King-Tai Ngan , Murali Narasimhan
- Applicant Address: CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: CA Santa Clara
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01L21/00 ; H01L21/302 ; H01L21/3065 ; H01L21/683 ; B05C13/02
Abstract:
The invention generally provides an apparatus that reduces backside sputtering of the substrate in a pre-clean chamber and other etch chambers. The invention also provides an apparatus that reduces flaking of material from the film formed on the surfaces of the process kit and extends the specified lifetime of a process kit. One aspect of the invention provides an apparatus for supporting a substrate, comprising a support pedestal contacting a central portion of the substrate and an insulator surrounding the support pedestal, the insulator having a beveled portion extending from a circumferential edge of the substrate.
Public/Granted literature
- USD408410S Combined radio and cassette player Public/Granted day:1999-04-20
Information query
