发明授权
- 专利标题： Cleaning apparatus and method
- 专利标题（中）： 清洗装置及方法
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申请号： US98751申请日： 1998-06-17
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公开(公告)号： US6085764A公开(公告)日： 2000-07-11
- 发明人: Kanji Kobayashi , Masao Yamaguchi , Shinya Yoshihara , Toshio Kubota , Jun Kudo
- 申请人： Kanji Kobayashi , Masao Yamaguchi , Shinya Yoshihara , Toshio Kubota , Jun Kudo
- 申请人地址： JPX Tokyo
- 专利权人： TDK Corporation
- 当前专利权人： TDK Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX9-210196 19970722
- 主分类号： B08B3/10
- IPC分类号： B08B3/10 ; B08B3/12 ; H01L21/00
摘要：
A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.
公开/授权文献
- USD419293S Auto dart case 公开/授权日：2000-01-25
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