摘要:
A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.
摘要:
A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.
摘要:
For cleaning a wafer by a cleaning apparatus, a cleaning liquid is contained in a cleaning bath. Leaving two brushes open, the wafer is inserted to the cleaning bath, placed on oscillation and rotation rollers and retained by the rollers. The brushes are closed and the wafer is held by the brushes. Next, the two brushes are rotated while the wafer is oscillated and rotated by the rollers and so on. Furthermore, ultrasonic vibrations are applied to the cleaning liquid in the cleaning bath by an ultrasonic generator. Scrub cleaning with the two brushes and ultrasonic cleaning by ultrasonic vibrations are thereby performed on the wafer.
摘要:
For cleaning a wafer by a cleaning apparatus, a cleaning liquid is contained in a cleaning bath. Leaving two brushes open, the wafer is inserted to the cleaning bath, placed on oscillation and rotation rollers and retained by the rollers. The brushes are closed and the wafer is held by the brushes. Next, the two brushes are rotated while the wafer is oscillated and rotated by the rollers and so on. Furthermore, ultrasonic vibrations are applied to the cleaning liquid in the cleaning bath by an ultrasonic generator. Scrub cleaning with the two brushes and ultrasonic cleaning by ultrasonic vibrations are thereby performed on the wafer.
摘要:
Provided is an absorptive article having absorption elements capable of following the body of a user. This absorptive article (1) comprises a generally rectangular base absorption element (2), a top absorption element (3) disposed on one surface of the base absorption element (2) at substantially lateral center of the base absorption element (2) and along the longitudinal direction of the base absorption element (2), and a fixing part (4) for fixing the base absorption element (2) to the top absorption element (3) so that at least one end of the top absorption element (3) in the longitudinal direction thereof is made to be a free end (31). A temporary locking part (5) for restricting the movement of the top absorption element (3) is provided on the top absorption element (3) near a free end part (32) thereof at least before application of the absorptive article to the body of the user.
摘要:
An absorbent article includes a front wing unit which is provided outside in a widthwise direction of the absorbent article more than an absorber, and extends to the outside in the widthwise direction of the absorber in an inside leg region which corresponds to an inside leg portion of a wearer; and a gather which is provided at each of edges of the absorber, which extends along a longitudinal direction of the absorbent article, and which prevents a bodily fluid of the wearer from leaking from the absorbent article. The front wing unit has a base part which is positioned at an innermost side in a widthwise direction of the absorbent article in the front wing unit; and the leakage gather extends to the outside in the widthwise direction of the absorbent article more than the base part as seen in plan view of the absorbent article.
摘要:
An absorbent article having a napkin body (2) comprising as the essentials a liquid-permeable top sheet (3), a liquid-impermeable back sheet (4), and a liquid-absorbing member (5) placed between the top sheet (3) and the back sheet (4), wherein a removable cover sheet (20A) having a length and a width which do not exceed respectively the length and width of the napkin body (2) is provided on the top sheet (3) side of the napkin body (2) in contact with the top sheet (3).
摘要:
A novel porous honeycomb structure highly functionalized as compared with the conventional example, manufacturing method thereof and an air cleaner using the structure are provided. The functionalized porous honeycomb structure is a silica gel form, and fine powder for adding the function is dispersed in the form. Further the method of manufacturing in accordance with the present invention includes the steps of (a) preparing silica sol by mixing ion exchange resin in sodium silicate aqueous solution; (b) removing said ion exchange resin and adjusting pH; (c) dispersing fine powder for adding a function to the silica sol; (d) gelating the silica sol to provide silica wet gel; and (e) freezing the silica wet gel.
摘要:
A semiconductor memory device includes: a capacitor formed on a substrate and including a lower electrode, a dielectric film and an upper electrode; a selection transistor formed at the substrate; an electrically conductive plug for providing electrical connection between the selection transistor and the capacitor; and a diffusion barrier film provided between the electrically conductive plug and the lower electrode of the capacitor. The diffusion barrier film is a TaxSi1−xNy film or a HfxSi1−xNy film (where 0.2
摘要:
A contact plug electrically connected with a MOS transistor is formed in a first interlayer dielectric. Then, a barrier metal material is deposited over the first interlayer dielectric and the contact plug, and patterned into a barrier metal electrically connected with the contact plug. After a SiN film is formed as an anti-oxygen-permeation film over the barrier metal and the first interlayer dielectric, the film is abraded by a chemical mechanical polishing technique until a top surface of the barrier metal is exposed. Then, a lower electrode material, a dielectric material and an upper electrode material are deposited in this order on the SiN film and the barrier metal, and then patterned such that a resulting lower electrode covers at least the entire upper surface of the barrier metal. Thereafter a second interlayer dielectric is deposited, and a heat treatment is performed in an oxygen ambient to recover film quality of a capacitor dielectric.