发明授权
- 专利标题: Single polysilicon DRAM cell with current gain
- 专利标题(中): 具有电流增益的单个多晶硅DRAM单元
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申请号: US170863申请日: 1998-10-13
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公开(公告)号: US6087690A公开(公告)日: 2000-07-11
- 发明人: Min-hwa Chi
- 申请人: Min-hwa Chi
- 申请人地址: TWX Hsinchu
- 专利权人: Worldwide Semiconductor Manufacturing Corporation
- 当前专利权人: Worldwide Semiconductor Manufacturing Corporation
- 当前专利权人地址: TWX Hsinchu
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/113
摘要:
A single polysilicon DRAM cell is disclosed. The DRAM cell comprises: a deep n-well in a silicon substrate; a p-well within the deep n-well; a gate structure over and straddling the deep n-well and the p-well, the gate structure being a stack of a thin gate oxide layer and a conductive layer; and a n+ well within the p-well and adjacent to a sidewall of the gate structure. The p-well potential can be reset to -V.sub.cc /2 representing "0", and written to V.sub.cc /2 representing "1". The parasitic n-channel MOS with the p-well as the "body" will have a threshold voltage modulated by the p-well potential at V.sub.cc /2 and -V.sub.cc /2 for representing "1" and "0" states, respectively.
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