Invention Grant
US6127203A Thermoplastic mounting of a semiconductor die to a substrate having a
mismatched coefficient of thermal expansion
失效
将半导体管芯热塑性安装到具有不匹配的热膨胀系数的衬底上
- Patent Title: Thermoplastic mounting of a semiconductor die to a substrate having a mismatched coefficient of thermal expansion
- Patent Title (中): 将半导体管芯热塑性安装到具有不匹配的热膨胀系数的衬底上
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Application No.: US304953Application Date: 1999-05-05
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Publication No.: US6127203APublication Date: 2000-10-03
- Inventor: Chang-Feng Wan , Richard Scott List , Curtis Gene Garrett , Dwight U. Bartholomew
- Applicant: Chang-Feng Wan , Richard Scott List , Curtis Gene Garrett , Dwight U. Bartholomew
- Applicant Address: NJ Parsippany
- Assignee: DRS Technologies, Inc.
- Current Assignee: DRS Technologies, Inc.
- Current Assignee Address: NJ Parsippany
- Main IPC: H01L21/58
- IPC: H01L21/58 ; H01L21/324
Abstract:
This invention relates to mounting integrated circuits (IC) to multi-chip modules (MCM) or substrates. More specifically, it provides a method of mounting a semiconductor die such as a thin slice of Mercury Cadmium Telluride (MCT) to a silicon semiconductor substrate, a read-out integrated circuit (ROIC), using a thermoplastic to reduce stress on the MCT caused by mismatched Coefficients of Thermal Expansion (CTE). This process provides for an array of infrared photodetectors on a material such as MCT to be mounted to a read-out integrated circuit (ROIC) using the Vertical Integrated Photodiode (VIP) approach to FPAs, while allowing double sided interdiffusion of CdTe for surface passivation to reduce dark currents and improve performance, without the problems associated with mismatched coefficients of thermal expansion during high temperature processes.
Public/Granted literature
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