发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US401185申请日: 1999-09-23
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公开(公告)号: US6128208A公开(公告)日: 2000-10-03
- 发明人: Niichi Itoh , Yasunobu Nakase , Tetsuya Watanabe , Chikayoshi Morishima
- 申请人: Niichi Itoh , Yasunobu Nakase , Tetsuya Watanabe , Chikayoshi Morishima
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX11-241122 19990827
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L21/8242 ; H01L27/108 ; G11C5/02
摘要:
Provided is a semiconductor memory having a layout structure in which a memory cell has excellent patterning controllability. A pattern of element components (active regions 10 to 15 and 21 to 23 and polysilicon regions 31 to 42) of a memory cell for one memory cell unit of a memory cell array region 1 is identical to that of a dummy cell of a peripheral dummy cell region 3, and both patterns present a line symmetrical relationship with respect to a boundary line BC1. In addition, a pattern of the memory cell for one memory cell unit of the memory cell array region 1 is identical to that of a dummy cell of a power wiring region 2, and both patterns present a line symmetrical relationship with respect to a boundary line BC2.
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