发明授权
US6131879A Piezoelectrically actuated microvalve 失效
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Piezoelectrically actuated microvalve
摘要:
A microvalve has a base element provided with a passage opening, a tappet, a suspension device for guiding the tappet, and a piezoelectric actuator for actuating the tappet. The suspension device guides the tappet relative to the base element in such a way that the passage opening can be closed or opened by the tappet. The longitudinal dimensions of the piezoelectric actuator can be changed by the application of an electric voltage. Longitudinally spaced ends of the piezoelectric actuator are connected to longitudinally spaced ends of the suspension device in such a way that the suspension device provides a way for mechanical translation between the actuator and the tappet. A change in the longitudinal dimensions of the piezoelectric actuator caused by the application of an electric voltage to the piezoelectric actuator is mechanically translated by the suspension device into a movement of the tappet essentially at right angles to the longitudinal direction so that the passage opening will be opened or closed. In addition, the suspension device is secured to the base element with the aid of a hinge-like element. At least two spaced points are used to secure the suspension device to the base element.
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