发明授权
- 专利标题： Portable apparatus for thin deposition
- 专利标题（中）： 用于薄沉积的便携式设备
-
申请号： US247474申请日： 1999-02-08
-
公开(公告)号： US6136167A公开(公告)日： 2000-10-24
- 发明人: Carlo Misiano , Enrico Simonetti
- 申请人： Carlo Misiano , Enrico Simonetti
- 申请人地址： ITX Carsoli
- 专利权人： CE.TE.V Centro Technologie Del Vuoto
- 当前专利权人： CE.TE.V Centro Technologie Del Vuoto
- 当前专利权人地址： ITX Carsoli
- 优先权： ITXRM98A0071 19980206
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; C23C14/35 ; H01J37/34 ; C23C16/00
摘要：
An apparatus for thin film deposition on fixed objects can be carried out using a portable vacuum deposition plant having a forechamber surrounding the deposition chamber and in which a process gas chamber slightly higher than that of the deposition chamber is maintained. The forechamber and the deposition chamber can be separately evacuated and vacuum seals can be provided between the chambers and the substrate. The source of the coating material may include a sputtering magnetron and a grid can be provided between the magnetron and the substrate.
公开/授权文献
- US5412861A Apparatus for laying a wire in a junction box 公开/授权日：1995-05-09
信息查询
IPC分类:
