Low absorbance coatings of silicon-nickel alloy in the form of oxides, nitrides and oxynitrides are disclosed along with a method for producing them by sputtering silicon-nickel targets comprising 3 to 18 weight percent nickel in atmospheres comprising reactive gases such as nitrogen, oxygen and mixtures thereof which may further comprise inert gas such as argon. The presence of nickel in the range of 3 to 18 weight percent provides target stability and enhanced sputtering rates over target of silicon alone or alloyed with aluminum, while maintaining a low refractive index and low absorbance, not only when sputtering in oxygen to produce an oxide coating, but also when sputtering in nitrogen or a mixture of nitrogen and oxygen to produce coatings of silicon-nickel nitride or oxynitride respectively.