Method for making a grating assisted optical waveguide device
    9.
    发明授权
    Method for making a grating assisted optical waveguide device 失效
    制造光栅辅助光波导器件的方法

    公开(公告)号:US4963177A

    公开(公告)日:1990-10-16

    申请号:US366445

    申请日:1989-06-15

    摘要: The present disclosure makes a grating assisted optical waveguide device. The method includes cleaning a substrate made of glass by means of cleaning agents; depositing a first layer made of metal onto a surface of the substrate by an evaporation process; forming a first mask by making openings in the first layer to expose first parts of the surface, the first mask being formed by a photolithographic process; immersing the substrate in a first bath of molten salt having a first preselected temperature to make a waveguide by increasing the refractive index of the glass in the first parts by an ion-exchange process; removing the first mask from the surface; immersing the substrate in a second bath of molten salt in order to bury the waveguide; depositing a second layer made of metal on the surface of the substrate by an evaporation process; forming a second mask by making openings in the second layer to expose second parts of the surface, the second mask being formed by a photolithographic process; immersing the substrate in a third bath of molten salt having a third preselected temperature to change the refractive index of the glass in the second parts by an ion-exchange process in order to form a grating, the refractive index obtained in this third immersing step being different from the refractive index obtained in the first immersing step, the third preselected temperature being lower than the first preselected temperature to avoid further diffusion of ions diffused in substrate in the first bath; and removing the second mask from the surface to obtain the grating assisted optical waveguide device.

    摘要翻译: 本发明公开了一种光栅辅助光波导器件。 该方法包括用清洁剂清洗由玻璃制成的衬底; 通过蒸发工艺将由金属制成的第一层沉积到衬底的表面上; 通过在所述第一层中形成开口以暴露所述表面的第一部分来形成第一掩模,所述第一掩模通过光刻工艺形成; 将基板浸入具有第一预选温度的熔融盐的第一浴中,以通过离子交换工艺增加第一部分中的玻璃的折射率来制造波导; 从表面去除第一个掩模; 将衬底浸入第二熔融盐浴中以便掩埋波导; 通过蒸发方法在衬底的表面上沉积由金属制成的第二层; 通过在所述第二层中形成开口以暴露所述表面的第二部分来形成第二掩模,所述第二掩模通过光刻工艺形成; 将基板浸入具有第三预选温度的熔融盐的第三浴中,以通过离子交换工艺改变第二部分中的玻璃的折射率以形成光栅,在该第三浸渍步骤中获得的折射率为 不同于在第一浸渍步骤中获得的折射率,第三预选温度低于第一预选温度,以避免在第一浴中在衬底中扩散的离子的进一步扩散; 并从表面去除第二掩模以获得光栅辅助光波导器件。

    Reflecting mirror
    10.
    发明授权
    Reflecting mirror 失效
    反射镜

    公开(公告)号:US4009947A

    公开(公告)日:1977-03-01

    申请号:US619526

    申请日:1975-10-03

    IPC分类号: C03C17/40 G02B1/10 G02B5/08

    摘要: A reflecting mirror which is composed of a reflecting silver layer formed on a surface of a glass base body and a protective layer being made of alloy consisting of copper and tin being formed on said reflecting silver layer. Since the reflecting layer is protected by a protective layer, this reflecting mirror has corrosion resistance.

    摘要翻译: 由形成在玻璃基体的表面上的反射银层和由铜和锡组成的合金制成的保护层构成的反射镜形成在所述反射银层上。 由于反射层被保护层保护,所以该反射镜具有耐腐蚀性。