发明授权
- 专利标题: Piezoelectric actuator and method for manufacturing the same
- 专利标题(中): 压电致动器及其制造方法
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申请号: US35717申请日: 1998-03-05
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公开(公告)号: US6140743A公开(公告)日: 2000-10-31
- 发明人: Koichiro Kishima , Tetsuo Nakayama , Takaaki Murakami
- 申请人: Koichiro Kishima , Tetsuo Nakayama , Takaaki Murakami
- 申请人地址: JPX Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPXP07-193365 19950728
- 主分类号: B41J2/045
- IPC分类号: B41J2/045 ; B41J2/055 ; B41J2/135 ; B41J2/14 ; B41J2/16 ; C23C2/34 ; H01L41/09 ; H01L41/22 ; H02N2/00 ; H01L41/04
摘要:
A plate material 1 and piezoelectric ceramics 2 are bonded together through an alloy layer 3 formed by an alloy forming reaction due to the mutual diffusion phenomena between a liquid metal including at least galium and the plate material 1 or the piezoelectric ceramics 2, or the mutual diffusion phenomena between the liquid metal and metal powder. The alloy layer 3 may include at least one or more of indium, tin and zinc and at least one or more of copper, silver, gold, and palladium. Further, a metal may be provided on at least one of the bonded surfaces of the plate material 1 and the piezoelectric ceramics 2. This metal may include one or more of copper, silver, gold, tin and palladum. In addition, a metal layer may be formed on the bonded surface 1a side of the plate material 1. Still further, an amorphous layer may be formed on at least one of the parts between the plate material 1 and the alloy layer 3, and between the piezoelectric ceramics 2 and the alloy layer 3.
公开/授权文献
- US5306452A Devolatilizing and/or processing systems and methods 公开/授权日:1994-04-26
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