发明授权
US6146503A Method and apparatus for dry surface treatment of an object 失效
一种物体的干表面处理方法和装置

Method and apparatus for dry surface treatment of an object
摘要:
In this process for dry surface treatment of at least one surface portion of an object, a gas is passed through an instrument for forming excited or unstable gas species, and said surface portion is brought in front of the outlet of said device with a view to treating it with said excited or unstable gas species, the secondary gas delivered as outlet from the instrument being subsequently taken in again by the Venturi effect and reinjected into the instrument.
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