A structure having shallow-implanted elevated source/drain regions is formed with doped sidewall spacers. Diffusion of dopants from the sidewall spacers forms a doped region extending from underneath the gate electrode, along the edge of the epitaxial layer, to the doped (and uppermost) regions of the elevated source/drain. Low junction capacitance, is achieved because the shallow implant of the elevated source/drain regions places the junction inside the source/drain region itself. Low source/drain resistance is achieved because the diffused doped region provides a doped path between the shallow implanted region of the elevated source/drain and the channel region. Low source/drain junction depth is achieved because a second spacer can prevent dopant from being implanted through any faceted areas of the epitaxial layer. The doped extensions of the source/drain regions also have exceptionally low junction depth. The overall process is simpler because it is independent of both facet angle and height of the epitaxial layer.