发明授权
- 专利标题: Tapered electrode for stacked capacitors
- 专利标题(中): 用于堆叠电容器的锥形电极
-
申请号: US123298申请日: 1998-07-28
-
公开(公告)号: US6165864A公开(公告)日: 2000-12-26
- 发明人: Hua Shen , Joachim Nuetzel , Carl J. Radens , David Kotecki
- 申请人: Hua Shen , Joachim Nuetzel , Carl J. Radens , David Kotecki
- 申请人地址: DEX Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Munich
- 主分类号: H01G4/12
- IPC分类号: H01G4/12 ; H01L21/02 ; H01L21/8242 ; H01L27/10 ; H01L27/108 ; H01L21/20
摘要:
A method for forming a stacked capacitor includes the steps of providing a first insulating layer having a conductive access path therethrough, forming a second insulating layer on the first insulating layer, forming a trench in the second insulating layer, the trench having tapered sidewalls, forming a first electrode in the trench and on the trench sidewalls, the first electrode being electrically coupled to the conductive access path, forming a dielectric layer on the first electrode and forming a second electrode on the dielectric layer. A stacked capacitor having increased surface area includes a first electrode formed in a trench provided in a dielectric material. The first electrode has tapered surfaces forming a conically shaped portion of the first electrode, the first electrode for accessing a capacitively coupled storage node.
公开/授权文献
- US5107984A Cosmetic case 公开/授权日:1992-04-28
信息查询