发明授权
- 专利标题: Optical component for polarization modulation, a mueller polarimeter and ellipsometer containing such an optical component, a process for the calibration of this ellipsometer, and an ellipsometric measurement process
- 专利标题(中): 用于偏振调制的光学部件,包含这种光学部件的微调偏振计和椭偏仪,用于校准该椭偏仪的方法以及椭圆测量过程
-
申请号: US09091400申请日: 1998-10-06
-
公开(公告)号: US06175412B1公开(公告)日: 2001-01-16
- 发明人: Bernard Drevillon , Eric Compain
- 申请人: Bernard Drevillon , Eric Compain
- 优先权: FR9613081 19961025
- 主分类号: G01J400
- IPC分类号: G01J400
摘要:
An optical component for modulation of polarization, a Mueller polarimeter and ellipsometer containing such an optical component. The optical component modulates a linearly polarized incident beam and returns a modulated beam. It includes a coupled phase modulator which modulates the incident beam twice in succession, the two modulations having the same frequency of &ohgr;/2&pgr;, and a coupling system modifying the polarization state of the light between the two modulations. The ellipsometer includes the means for detection of a measurement beam returned by a sample, which receives the modulated beam, in addition to a processing unit. The means of detection include a polarimeter producing n measured quantities representing the polarization states of the beam, and the processing unit produces m values for each of these quantities by Fourier transform, with n×m≧16 and m≧4, providing simultaneous access to the sixteen components of the Mueller matrix of the sample.
信息查询