公开(公告)号：US07863113B2

公开(公告)日：2011-01-04

申请号：US10544787

申请日：2004-02-06

申请人： Pere Roca I Cabarrocas ,  Régis Vanderhaghen ,  Bernard Drevillon

发明人： Pere Roca I Cabarrocas ,  Régis Vanderhaghen ,  Bernard Drevillon

IPC分类号： H01L21/00

CPC分类号： H01L29/66765 ,  H01L29/78603 ,  H01L29/78678

摘要： A transistor for active matrix display and a method for producing the transistor (1). The transistor (1) includes a microcrystalline silicon film (5) and an insulator (3). The crystalline fraction of the microcrystalline silicon film (5) is above 80%. According to the invention, the transistor (1) includes a plasma treated interface (4) located between the insulator (3) and the microcrystalline silicon film (5) so that the transistor (1) has a linear mobility equal or superior to 1.5 cm2V−1s−1, shows threshold voltage stability and wherein the microcrystalline silicon film (5) includes grains (6) whose size ranges between 10 nm and 400 nm. The invention concerns as well a display unit having a line-column matrix of pixels that are actively addressed, each pixel comprising at least a transistor as described above.

摘要翻译： 一种用于有源矩阵显示的晶体管和一种用于制造晶体管（1）的方法。 晶体管（1）包括微晶硅膜（5）和绝缘体（3）。 微晶硅膜（5）的结晶度高于80％。 根据本发明，晶体管（1）包括位于绝缘体（3）和微晶硅膜（5）之间的等离子体处理的界面（4），使得晶体管（1）的线性迁移率等于或高于1.5cm 2V -1s-1示出了阈值电压稳定性，其中微晶硅膜（5）包括尺寸在10nm和400nm之间的晶粒（6）。 本发明还涉及具有被积极寻址的像素的行列矩阵的显示单元，每个像素至少包括如上所述的晶体管。

公开(公告)号：US20100074807A1

公开(公告)日：2010-03-25

申请号：US12594061

申请日：2008-03-21

申请人： Pavel Bulkin ,  Bernard Drevillon

发明人： Pavel Bulkin ,  Bernard Drevillon

IPC分类号： H05H1/46 ,  H01J37/32

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/3222 ,  H01J37/32678

摘要： An apparatus for generating a plasma includes a vacuum chamber having a wall and a plasma source including one or more devices for exciting the plasma, and elements for generating a constant magnetic field around the plasma to couple microwave energy into plasma at electron cyclotron resonance, each of the devices for exciting the plasma including a coaxial microwave connector able to be connected to a microwave energy source and a loop antenna able to emit a microwave energy for exciting the plasma. The loop antenna of the one or more devices is positioned inside the vacuum chamber in order to be in contact with the plasma and the elements for generating a constant magnetic field include at least two magnetic dipoles placed on the wall of the vacuum chamber, each of the one or more devices for exciting the plasma having the two magnetic dipoles placed on both sides.

摘要翻译： 一种用于产生等离子体的装置包括具有壁和等离子体源的真空室，该等离子体源包括用于激发等离子体的一个或多个装置，以及用于在等离子体周围产生恒定磁场的元件，以将电子回旋共振的微波能量耦合到等离子体中 用于激发等离子体的装置，包括能够连接到微波能量源的同轴微波连接器和能够发射用于激发等离子体的微波能量的环形天线。 一个或多个装置的环形天线位于真空室内部以便与等离子体接触，并且用于产生恒定磁场的元件包括放置在真空室的壁上的至少两个磁偶极子 用于激发具有放置在两侧的两个磁偶极子的等离子体的一个或多个装置。

公开(公告)号：US07196792B2

公开(公告)日：2007-03-27

申请号：US10684361

申请日：2003-10-15

申请人： Bernard Drevillon ,  Antonello De Martino

发明人： Bernard Drevillon ,  Antonello De Martino

IPC分类号： G01J4/00

CPC分类号： G01J4/04 ,  G01N21/211

摘要： A liquid crystal based polarimetric system, a process for the calibration of this polarimetric system, and a polarimetric measurement process intended for measuring the representative parameters of a sample in which the polarimetric system contains an excitation section emitting a light beam that passes through a polarization state generator (PSG) and onto a sample. After reflection or transmission by the sample, the beam goes through an analysis section with a polarization state detector (PSD). The PSG and PSD each have a first and a second liquid crystal elements LCj (j=1,2) having, for each LCj element of the PSG (respectively for each LCj element of the PSD), an extraordinary axis making an angle θj (resp. θ′j) with respect to the polarization direction (i), and a retardation δj (resp (δ′j) between its ordinary and extraordinary axes, the liquid crystals LCj elements being positioned in reverse order in the PSD with respect to the LCj elements of the PSG.

摘要翻译： 基于液晶的偏振系统，用于校准该偏振系统的方法和用于测量样品的代表性参数的偏振测量过程，其中偏振系统包含发射通过偏振状态的光束的激发部分 发电机（PSG）和样品。 在通过样品反射或透射之后，光束通过具有偏振状态检测器（PSD）的分析部分。 PSG和PSD各自具有第一和第二液晶元件LC（j = 1,2），其对于PSG的每个LC SUB元素分别（分别用于 PSD的每个LC 元素），相对于极化的角度θθ（相对于θ'）的非常轴 方向（i）和在其普通轴和非常轴之间的延迟差Δ（分别为（δ'）），液晶LC＆lt; 元件在PSD中相对于PSG的LC <！ - SIPO - >元件以相反的顺序被定位。

公开(公告)号：US20050012041A1

公开(公告)日：2005-01-20

申请号：US10874322

申请日：2004-06-24

申请人： Enric Garcia-Caurel ,  Bernard Drevillon ,  Laurent Schwartz

发明人： Enric Garcia-Caurel ,  Bernard Drevillon ,  Laurent Schwartz

IPC分类号： G01N21/35 ,  G01N21/21 ,  G01N33/487 ,  G01J5/02 ,  G01J4/00

CPC分类号： G01N21/211

摘要： The invention is about an FTIR ellipsometry device and process for characterization of samples of complex biological materials, notably micro-organisms. According to the device part of the invention, the sample is a preparation by a deposition of the biological material on a substrate, the FTIR ellipsometry device has means to illuminate the sample on the substrate with variable wavelength infrared light and to produce at each predetermined value of the variable wavelength a measurement, the measurements defining a characterization spectrum, each measurement being one of the following values: Ψ, one of ellipsometric parameters in relation to a complex reflectivity ratio; Δ, one of ellipsometric parameters in relation to a complex reflectivity ratio; a trigonometric function of Ψ and Δ; or a derivative at any order of one of the previous values.

摘要翻译： 本发明涉及用于表征复杂生物材料，特别是微生物样品的FTIR椭偏仪装置和方法。 根据本发明的器件部分，样品是通过将生物材料沉积在基底上的制剂，FTIR椭偏仪装置具有用可变波长红外光照射衬底上的样品并以每个预定值产生的装置 可变波长的测量，测量定义了表征光谱，每个测量是以下值之一：Psi，相对于复反射率的椭偏参数之一; 三角形，复数反射率之间的椭偏参数之一; Psi和Delta的三角函数; 或以前一个值之一的任何顺序派生。

公开(公告)号：US08214024B2

公开(公告)日：2012-07-03

申请号：US11994177

申请日：2006-06-27

申请人： Antonello De Martino ,  Bernard Drevillon ,  Laurent Schwartz ,  André Nazac ,  Bernard Huynh

发明人： Antonello De Martino ,  Bernard Drevillon ,  Laurent Schwartz ,  André Nazac ,  Bernard Huynh

IPC分类号： G01J4/00

CPC分类号： A61B1/303 ,  A61B1/042 ,  A61B1/0669 ,  A61B5/0084 ,  G01J4/04 ,  G01N21/21 ,  G01N21/211

摘要： An electronic polarimetric imaging system for a colposcopy device designed for in vivo observation of a cervix, wherein the colposcopy device includes a light source for illuminating the observable cervix and at least visual elements for monitoring an image of the cervix, the illumination optical path towards the cervix and the image optical path coming back from the cervix being separated from one another over at least one portion of the paths thereof. The system includes a polarimetric adapter housing which is removable into the separated portion of the illumination and image optical paths, the polarimetric adapter housing including a polarisation state generator (PSG) on the illumination optical path and a polarisation analyser (PSA) on the image optical path, wherein the polarisation state generator (PSG) and the polarisation analyser (PSA) are controllable. Several levels of polarimetric characterisation are possible. An adaptor housing is also disclosed.

摘要翻译： 一种用于体内观察子宫颈的阴道镜装置的电子偏振成像系统，其中所述阴道镜装置包括用于照射所述可观察到的子宫颈的光源和至少用于监视子宫颈图像的视觉元件，朝向所述子宫颈的照明光路 子宫颈和从子宫颈返回的图像光路在其路径的至少一部分上彼此分离。 该系统包括可移除到照明和图像光路的分离部分中的偏振适配器壳体，偏振适配器壳体包括照明光路上的偏振状态发生器（PSG）和图像光学上的偏振分析器（PSA） 路径，其中偏振状态发生器（PSG）和偏振分析器（PSA）是可控的。 几种水平的极化表征是可能的。 还公开了适配器外壳。

公开(公告)号：US20110205539A1

公开(公告)日：2011-08-25

申请号：US13126618

申请日：2009-10-28

申请人： Denis Cattelan ,  Enric Garcia-Cautel ,  Antonello De Martino ,  Bernard Drevillon

发明人： Denis Cattelan ,  Enric Garcia-Cautel ,  Antonello De Martino ,  Bernard Drevillon

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/213

摘要： A spectroscopic polarimetric system of broad spectral range, includes a light source suitable for emitting an incident light beam over a wavelength range, a polarization state generator (PSG), a polarization state analyzer (PSA), and a detector. The PSG and the PSA have respective elements for modulating the polarization of the light beam. The elements of the PSG for modulating polarization are suitable for generating a sequence of m polarization states with m>4 at each measurement wavelength, the elements of the PSA for modulating polarization are suitable for determining a sequence of n polarization states with n>4 for each measurement wavelength, and the detector elements are suitable for acquiring a sequence of N measurements with 16

摘要翻译： 具有宽光谱范围的光谱极化系统包括适于发射波长范围内的入射光束的光源，偏振状态发生器（PSG），偏振状态分析器（PSA）和检测器。 PSG和PSA具有用于调制光束的偏振的各自的元件。 用于调制偏振的PSG的元件适用于在每个测量波长处产生具有m≥4的m个偏振态的序列，用于调制偏振的PSA的元件适用于确定n≥4的n个极化状态的序列 每个测量波长和检测器元件适合于在每个波长处获得具有16

公开(公告)号：US20070263219A1

公开(公告)日：2007-11-15

申请号：US11793674

申请日：2005-12-22

申请人： Antonello De Martino ,  Bernard Drevillon

发明人： Antonello De Martino ,  Bernard Drevillon

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01B11/0641 ,  G01N2021/213

摘要： Method and a polarimetric measurement device of a planar object carrying patterns repeated regularly and forming the lines of a grid. A first measurement is carried out at zero order, under an angle of incidence θ1 and for a first azimuthal angle φ1, a second measurement at least is carried out at zero order, under an angle of incidence θ2 and for a second azimuthal angle φ2, the polarization of the incident beam is modulated and the polarization of the reflected beam is analyzed for each measurement, theoretical polarimetric data is calculated for a model object of the real object, the model object including parameters adjustable using a formalism of electromagnetism. An iterative comparison of the measurements is conducted with the theoretical polarimetric data for different values of the adjustable parameters.

摘要翻译： 方法和平面物体的极化测量装置，其承载有规律地重复形成网格线的图案。 第一次测量是以零级，在入射角θ1下进行的，而对于第一方位角φ1> 1，第二测量至少在零 在入射角θ2的范围内，并且对于第二方位角Φ2 2，入射光束的偏振被调制，并且分析反射光束的偏振 每个测量，理论极化数据是为真实对象的模型对象计算的，模型对象包括使用电磁形式来调整的参数。 使用理论极化数据对可调参数的不同值进行测量的迭代比较。

公开(公告)号：US07046379B2

公开(公告)日：2006-05-16

申请号：US10470994

申请日：2002-01-31

申请人： Alfred Hofrichter ,  Bernard Drevillon ,  Dmitri Kouznetsov

发明人： Alfred Hofrichter ,  Bernard Drevillon ,  Dmitri Kouznetsov

IPC分类号： G01B11/28

CPC分类号： G01B11/0616 ,  G01N21/211

摘要： A method for characterizing or controlling the production of a thin-layered component using optical methods. Acquired signals S1 and S2 are processed in order to obtain parameters x, ∈ of the deposited layers. The stacking is represented by the product of two Abeles matrices for each direction of polarization s (perpendicular to the incidence plane) and p (parallel to the incidence plane): a known matrix Mos,p representing the support and matrix dMs,p representing a thin transparent layer being deposited. The signal variations measured, dS1 and dS2, are inverted to obtain thickness x and dielectric constant ∈ of the thin layer by the following operations: Taylor expansion as a function of variation dx of thickness x of the thin layer of the coefficients of matrix dM; the coefficients of matrix Ms,p are calculated each in the form A(∈±2)dx2+B(∈±1)dx+C and the relation S1,2=A1,2(∈±2) dx2+B1,2(∈±1) dx+C1,2 is thereby deduced which connects signals S1 and S2 to parameters ∈ and dx; dx is eliminated and a master function P(∈±4)=0 is thereby deduced; the equation is solved and the solutions are selected corresponding to values that are physically plausible in order to measure ∈ and use the ∈ value obtained to determine dx.

摘要翻译： 使用光学方法表征或控制薄层成分的制造的方法。 处理获取信号S 1和S 2以获得沉积层的参数x，∈。 堆叠由用于每个偏振方向s（垂直于入射平面）和p（平行于入射平面）的两个Abeles矩阵的乘积表示：已知矩阵Mo S s，p < 支撑和矩阵dM，表示沉积的薄透明层。 通过以下操作，测量的信号变化dS1和I2S2被反转以获得薄层的厚度x和介电常数ε：泰勒展开作为 矩阵系数dM的薄层厚度x的变化dx; 矩阵M S，P N的系数各自以形式A（∈^{±2）dx2 + B（∈ ±1）dx + C，以及关系S 1,2> = 1,2＆lt; 2＆lt; 2＆gt; 因此，推导出了连接信号的SUP> 2 + B 1,2（∈±±1）dx + C 1,2 < S＆lt; 1＆gt;和S＆gt; 2＆gt;到参数∈和dx; 从而推断出dx被消除，从而推断出主函数P（∈±4）= 0; 求解等式，并且对应于物理上合理的值来选择解，以便测量∈并使用获得的∈值来确定dx。}

公开(公告)号：US06561198B1

公开(公告)日：2003-05-13

申请号：US09623456

申请日：2000-11-06

申请人： Bernard Drevillon ,  Nicolas Bertrand ,  Jean-Christophe Rostaing

发明人： Bernard Drevillon ,  Nicolas Bertrand ,  Jean-Christophe Rostaing

IPC分类号： C25F500

CPC分类号： C23G5/00 ,  B08B7/0035

摘要： In this method for the surface treatment of a metal part (12) for the purpose of deoxidizing it and/or cleaning it, a sealed chamber (16), in which the part to be treated is placed, is filled with a low-pressure reducing gas mixture, a static magnetic field is created in a region of the chamber (16) separate from the region in which the part (12) to be treated is placed and the gas mixture is excited by means of an electromagnetic wave injected into the chamber (16) so as to generate a treatment plasma in the gas, the intensity of the static magnetic field corresponding to electron cyclotron resonance established in the chamber in a distributed manner.

摘要翻译： 在用于对其进行脱氧和/或清洁的金属部件（12）的表面处理的方法中，将待处理部件放置在其中的密封室（16）填充有低压 减少气体混合物，在与被处理部分（12）放置的区域分离的腔室（16）的区域中产生静态磁场，并且气体混合物通过注入到所述待处理的电磁波中而被激发 （16），以在气体中产生处理等离子体，以分布式的方式在腔室中建立对应于电子回旋共振的静磁场的强度。

公开(公告)号：US5536936A

公开(公告)日：1996-07-16

申请号：US373933

申请日：1995-01-11

申请人： Bernard Drevillon ,  Jean-Yves Parey ,  Razvigor Ossikovski

发明人： Bernard Drevillon ,  Jean-Yves Parey ,  Razvigor Ossikovski

IPC分类号： G01J4/04 ,  G01J3/433 ,  G01N21/21 ,  G01J3/50

CPC分类号： G01N21/211

摘要： This invention concerns a spectroscopic ellipsometer modulated at a frequency (.omega..sub.m) intended for taking measurements of a sample (3). The spectroscopic ellipsometer is phase modulated, the sample being excited by external means (16) producing periodic, alternating excitation at a frequency (.OMEGA..sub.e). The measurement contains the ellipsometric parameter values (.psi., .DELTA.) of the sample, respectively in the presence of (.psi..sub.1, .DELTA..sub.1) and in the absence of (.psi..sub.2, .DELTA..sub.2) excitation of the sample, as a function of excitation frequency (.OMEGA..sub.e).

摘要翻译： 本发明涉及以用于取样（3）的测量的频率（ω）调制的光谱椭圆计。 光谱椭偏仪是相位调制的，样品被外部装置（16）激发，产生频率（OMEGA e）的周期性交替激发。 测量值分别包含样品的椭偏参数值（psi，DELTA），分别为（psi 1，DELTA 1）和不存在样品的（psi 2，DELTA 2）激发作为激发的函数 频率（OMEGA e）。