公开(公告)号：US06831742B1

公开(公告)日：2004-12-14

申请号：US09695577

申请日：2000-10-23

申请人： Zhifeng Sui ,  Hongqing Shan ,  Nils Johansson ,  Hamid Noorbakhsh ,  Yu Guan

发明人： Zhifeng Sui ,  Hongqing Shan ,  Nils Johansson ,  Hamid Noorbakhsh ,  Yu Guan

IPC分类号： G01J400

CPC分类号： G01N21/956 ,  G01N21/21 ,  G01N21/71 ,  G01N21/9501 ,  H01J37/32935 ,  H01L21/31116 ,  H01L21/31633

摘要： A substrate processing apparatus 27 comprises a chamber 35 capable of processing a substrate 20, a radiation source 58 to provide a radiation, a radiation polarizer 59 adapted to polarize the radiation to one or more polarization angles that are selected in relation to an orientation 33 of a feature 25 being processed on the substrate 20, a radiation detector 54 to detect radiation reflected from the substrate 20 during processing and generate a signal, and a controller 100 to process the signal.

摘要翻译： 衬底处理装置27包括能够处理衬底20的腔室35，用于提供辐射的辐射源58，适于将辐射极化到一个或多个偏振角的辐射偏振器59，所述偏振角相对于 在衬底20上处理的特征25，用于在处理期间检测从衬底20反射的辐射并产生信号的辐射检测器54以及处理该信号的控制器100。

公开(公告)号：US06822737B2

公开(公告)日：2004-11-23

申请号：US10009937

申请日：2002-06-04

申请人： Tetsuyuki Kurata ,  Takahiro Nishioka ,  Yoshihiro Togashi ,  Susumu Sato

发明人： Tetsuyuki Kurata ,  Takahiro Nishioka ,  Yoshihiro Togashi ,  Susumu Sato

IPC分类号： G01J400

CPC分类号： G02F1/1309 ,  G01B11/26

摘要： An apparatus for detecting a pretilt angle is comprised of a light source 1, a polarizer 2, a liquid-crystal cell 3, a quarter-wave plate 4, an analyzer 5, a photodetector 6, and a processing device. The processing device receives from the photodetector transmitted light intensities of light that is transmitted through the liquid-crystal cell 3 at a plurality of light incident angles. The processing device calculates Stokes parameters corresponding to the plurality of light incident angles based upon the transmitted light intensity corresponding to the plurality of light incident angles. Furthermore, an apparent retardation corresponding to the plurality of light incident angles is determined based upon the Stokes parameters corresponding to the plurality of light incident angles. The pretilt angle of the liquid-crystal cell 3 is determined based upon the determined apparent retardation corresponding to the plurality of light incident angles.

摘要翻译： 用于检测预倾角的装置包括光源1，偏振器2，液晶单元3，四分之一波片4，分析器5，光电检测器6和处理装置。 处理装置从光电检测器接收以多个光入射角透射通过液晶单元3的光的透射光强度。 处理装置基于与多个光入射角对应的透射光强度来计算与多个光入射角对应的斯托克斯参数。 此外，基于与多个光入射角对应的斯托克斯参数来确定与多个光入射角相对应的视在延迟。 基于与多个光入射角相对应的确定的视在延迟来确定液晶单元3的预倾角。

公开(公告)号：US06813021B2

公开(公告)日：2004-11-02

申请号：US09767919

申请日：2001-01-24

申请人： Yun Chur Chung ,  Chul Han Kim ,  Dae Kwang Jung ,  Jun Hang Lee

发明人： Yun Chur Chung ,  Chul Han Kim ,  Dae Kwang Jung ,  Jun Hang Lee

IPC分类号： G01J400

CPC分类号： G01J4/00

摘要： The present invention relates to a method and apparatus for automatically monitoring an optical signal-to-noise ratio in which an arbitrarily polarized optical signal including an unpolarized ASE noise is inputted to a rotating quarter-wave plate and then to a rotating linear polarizer so that a maximum power and a minimum power of the signal outputted from the rotating linear polarizer can be detected, and the detected maximum power and minimum power is used for automatically monitoring the optical signal-to-noise ratio. The method for monitoring the optical signal-to-noise ratio (OSNR) using a polarization-nulling method, comprises the steps of: (a) linearly polarizing an arbitrarily polarized optical signal including an unpolarized ASE noise; (b) separating the optical signal and the ASE noise from the linearly polarized optical signal including the unpolarized ASE noise to measure a power of the optical signal and a power of the ASE noise included in a bandwidth of an optical signal; and (c) obtaining the optical signal-to-noise ratio (OSNR) using the measured optical signal power and ASE noise power.

摘要翻译： 本发明涉及一种用于自动监测光信噪比的方法和装置，其中将包括非偏振ASE噪声的任意偏振光信号输入到旋转四分之一波片，然后输入到旋转线性偏振器，使得 可以检测从旋转线性偏振器输出的信号的最大功率和最小功率，并且使用检测到的最大功率和最小功率来自动监测光信噪比。 使用偏振归零方法监测光信噪比（OSNR）的方法包括以下步骤：（a）线性偏振包括非偏振ASE噪声的任意偏振光信号; （b）从包括非偏振ASE噪声的线偏振光信号中分离出光信号和ASE噪声，以测量包括在光信号的带宽中的光信号的功率和ASE噪声的功率; 和（c）使用所测量的光信号功率和ASE噪声功率获得光信噪比（OSNR）。

公开(公告)号：US06804002B2

公开(公告)日：2004-10-12

申请号：US10297839

申请日：2002-12-11

申请人： Ilya Fine ,  Boris Fikhte ,  Mark Vinokur

发明人： Ilya Fine ,  Boris Fikhte ,  Mark Vinokur

IPC分类号： G01J400

CPC分类号： A61B5/6826 ,  A61B5/0053 ,  A61B5/14558 ,  A61B5/6838 ,  G01N21/21

摘要： A method and device for optical measurements are presented for determining the concentration of a substance in patient's blood. Optical measurement sessions are applied to a measurement location in a blood containing medium during certain time period. The optical measurements include illumination of the measurement location with incident light of at least one selected wavelength, detection, at each measurement session, of at least two light responses of the medium characterized by at least two different polarization states of detected light, respectively, and generation of data representative thereof. Measured data so obtained is in the form of at least two time variations of the light responses of the medium characterized by different polarization states of detected light, respectively, a relation between the time variations being indicative of the concentration of the substance in blood.

摘要翻译： 提出了一种用于光学测量的方法和装置，用于确定患者血液中物质的浓度。 在特定时间段内将光学测量会话应用于含血培养基中的测量位置。 光学测量包括利用至少一个选定波长的入射光照射测量位置，在每个测量会话处检测分别以检测光的至少两个不同极化状态为特征的介质的至少两个光响应，以及 代表其的数据的生成。 如此获得的测量数据分别是以检测到的光的不同极化状态为特征的介质的光响应的至少两次时间变化的形式，时间变化之间的关系指示血液中物质的浓度。

公开(公告)号：US06798510B2

公开(公告)日：2004-09-28

申请号：US10322840

申请日：2002-12-18

申请人： Kiyohisa Fujita

发明人： Kiyohisa Fujita

IPC分类号： G01J400

CPC分类号： G01M11/337

摘要： Wavelength dependent measurement is made by launching light into an object 8 to be measured and receiving transmitted light from the object 8 while continuously changing wavelengths of output light. Next, peak wavelength detection processing for detecting a wavelength at the time when loss or gain of the transmitted light from the object 8 becomes maximum based on a wavelength dependent measurement result is performed. Then, polarization dependent loss measurement processing for measuring polarization dependent loss of the object 8 is performed by measuring the transmitted light from the object 8 while launching light of a measurement wavelength detected into the object 8 and randomly changing a polarization state of the light. Further, a control circuit processes associating a wavelength dependent analysis result with a PDL measurement result, and displays its result on a display part 2.

摘要翻译： 通过将光发射到待测量的对象8中并且在连续改变输出光的波长的同时接收来自对象8的透射光而进行波长依赖测量。 接着，进行基于波长相关测量结果来检测来自对象8的透射光的损失或增益变为最大时的波长的峰值波长检测处理。 然后，通过在检测到对象8的测量波长的光的同时测量来自对象8的透射光并随机改变光的偏振状态来进行用于测量对象8的偏振相关损耗的偏振相关损耗测量处理。 此外，控制电路处理将波长相关分析结果与PDL测量结果相关联，并将其结果显示在显示部分2上。

公开(公告)号：US06765671B2

公开(公告)日：2004-07-20

申请号：US10149693

申请日：2002-11-18

申请人： Richard S. Priestley

发明人： Richard S. Priestley

IPC分类号： G01J400

CPC分类号： G01M11/0257 ,  G01J4/00

摘要： A method for automating measurement of an optical property of a sample includes selecting a measurement aperture around a reference point on the sample (38), generating a set of grid nodes that fall within the measurement aperture (68), calculating the radial distance of each node with respect to a reference point within the measurement aperture, and calculating the angular position of each node with respect to the vertical. The method also includes moving a light source (32) and a light detector along the vertical and rotating the sample to measurement positions in which the light source and the light detector are aligned with one of the nodes in the measurement aperture, and measuring the optical property at the measurement position by energizing the light source and interrogating the detector. The calculated radial distances and angular positions are used to control positioning of the light source and the light detector and rotation of the sample.

摘要翻译： 用于自动测量样品的光学性质的方法包括：选择在样品（38）上的参考点周围的测量孔径，产生落在测量孔径（68）内的一组网格节点，计算每个 节点相对于测量孔径内的参考点，并且计算每个节点相对于垂直线的角位置。 该方法还包括沿着垂直方向移动光源（32）和光检测器，并将样品旋转到测量位置，其中光源和光检测器与测量孔中的一个节点对准，并测量光学 通过激励光源并询问检测器在测量位置的属性。 计算的径向距离和角位置用于控制光源和光检测器的定位以及样品的旋转。

公开(公告)号：US06762837B2

公开(公告)日：2004-07-13

申请号：US09983186

申请日：2001-10-23

申请人： Hiroyuki Iwata

发明人： Hiroyuki Iwata

IPC分类号： G01J400

CPC分类号： H04B10/2572 ,  G01J4/04 ,  G02F1/0136 ,  G02F1/09 ,  H04J14/02 ,  H04J14/06

摘要： In a polarization compensator for converting a polarization state of a lightwave, and a wavelength division multiplexing apparatus using same, a controller of the polarization compensator controls a rotator to orient a polarization plane of an input lightwave to a polarization plane of a reference polarizer. Also, the controller receives an output lightwave from the polarization compensator, of the above-mentioned present invention, which inputs the input lightwave through the rotator and a first ¼ wave plate, through a second ¼ wave plate and a polarizer having the polarization plane set in the reference direction, and the input lightwave is compensated to a linear polarization having the polarization plane of the reference direction based on a received polarization signal. Furthermore, a plurality of polarization compensators and a coupler are connected directly or with a connector so as to prevent the polarization planes of the lightwaves whose wavelengths are adjoining from coinciding with each other, and preferably the polarization compensators and the coupler are connected directly or with connectors so that the polarization planes are orthogonal.

摘要翻译： 在用于转换光波的偏振态的偏振补偿器和使用它的波分复用装置中，偏振补偿器的控制器控制旋转器将输入光波的偏振面定向到参考偏振器的偏振面。 此外，控制器接收来自偏振补偿器的输出光波，上述本发明通过旋转器和第一1/4波片通过第二1/4波片和具有偏振面集合的偏振器输入输入光波 并且基于所接收的偏振信号将输入光波补偿为具有基准方向的偏振面的线偏振。 此外，多个极化补偿器和耦合器直接或与连接器连接，以防止其波长相邻的光波的偏振面彼此重合，并且优选地，极化补偿器和耦合器直接连接或与 连接器，使得偏振面正交。

公开(公告)号：US06757062B2

公开(公告)日：2004-06-29

申请号：US09772325

申请日：2001-01-29

申请人： Atsushi Dohi

发明人： Atsushi Dohi

IPC分类号： G01J400

CPC分类号： G01B11/0641

摘要： According to a method of measuring a thickness, to measure a thickness d of a liquid crystal layer 11, a property of reflected light is utilized, in that the light returns maintaining the same polarizing plane as that of an entrance when a polarizing plane-maintaining condition is satisfied in which a difference in optical path lengths between an ordinary ray and an extraordinary ray of the reflected light is a sum of an integer multiple of the wavelength and a half-wavelength or an integer multiple, to find a wavelength at which the polarizing plane-maintaining condition is satisfied. A reasonable &Dgr;n·d is thereby found. This is performed for a plurality of wavelengths to find a relational expression of a wavelength and &Dgr;n·d. A known combination of a wavelength &lgr; and &Dgr;n is assigned to the relational expression to find d.

摘要翻译： 根据测量厚度的方法，为了测量液晶层11的厚度d，利用反射光的性质，因为当维持偏振平面时，光返回维持与入口相同的偏振平面 满足条件，其中普通光线和反射光的非常光线之间的光程长度的差是波长的整数倍和半波长或整数倍的和，以找到波长 极化平面保持条件得到满足。 因此找到合理的Deltan.d。 这是针对多个波长执行的，以找到波长的关系表达式和Deltan.d。 将波长λ和Deltan的已知组合分配给关系表达式以找到d。

公开(公告)号：US06710875B1

公开(公告)日：2004-03-23

申请号：US09641795

申请日：2000-08-18

申请人： James M. Zavislan

发明人： James M. Zavislan

IPC分类号： G01J400

CPC分类号： G02B21/0056 ,  G01J4/00 ,  G02B21/0032 ,  G02B21/0068

摘要： The quality of images produced by confocal microscopy, and especially scanning laser confocal microscopy, is enhanced especially for images obtained in turbid mediums such as many biological tissue specimens, by reducing speckle from scatterers that exist outside (above and below) the focal plane region which is being imaged by utilizing sheared beams, both of which are focused to spots in the focal or image plane (region of interest) and polarizing the beams to have opposite senses of circular polarization (right and left handed circular polarization). The return light from the image plane of certain polarization is detected after passing through the confocal aperture of the confocal microscope. Light from scatterers outside the region of interest, which are illuminated by both of the sheared beams, interfere thereby reducing speckle due to such scatterers, and particularly scatters which are adjacent to the image plane. Sheared beams having orthogonal linear polarization, as may be obtained from a Wollaston or Nomarski prism are converted into circularly polarized beams of opposite polarization sense by a quarter wave plate. The optical signals representing reflections from the focal plane are derived by polarizing optics which may either, be a polarizing beamsplitter in the incident beam path or with a retarder and analyzer. The retarder may be selected to provide different polarization phase shift of the return light, and with the analyzer, detects the degree of elliptical polarization representing the optical activity and circular dichroism producing the optical signal representing the image.

摘要翻译： 通过共聚焦显微镜，特别是扫描激光共聚焦显微镜产生的图像的质量，特别是对于在诸如许多生物组织样本的混浊介质中获得的图像，通过减少焦平面区域外（高于和低于）的散射体的斑点而被增强 通过利用剪切光束进行成像，两者都被聚焦到焦点或图像平面（感兴趣区域）中的斑点，并且使光束偏振以具有相反的圆偏振感（右和左旋圆偏振）。 在通过共聚焦显微镜的共聚焦孔之后，检测出来自某些偏振图像平面的返回光。 由两束剪切光束照射的感兴趣区域之外的散射体的光会因此而减少由于这种散射体引起的斑点，特别是与图像平面相邻的散射。 具有从Wollaston或Nomarski棱镜获得的具有正交线性极化的剪切梁被四分之一波片转换为具有相反偏振感的圆偏振光束。 表示来自焦平面的反射的光学信号由偏振光学器件衍生，其可以是入射光束路径中的偏振分束器或者延迟器和分析器。 可以选择延迟器以提供返回光的不同的偏振相移，并且利用分析仪检测表示光学活动的椭圆偏振度和产生表示图像的光信号的圆二色性。

公开(公告)号：US06624890B2

公开(公告)日：2003-09-23

申请号：US10155194

申请日：2002-05-24

申请人： Vadim Backman ,  Ramachandra R. Dasari ,  Rajan Gurjar ,  Irving Itzkan ,  Lev Perelman ,  Michael S. Feld

发明人： Vadim Backman ,  Ramachandra R. Dasari ,  Rajan Gurjar ,  Irving Itzkan ,  Lev Perelman ,  Michael S. Feld

IPC分类号： G01J400

CPC分类号： A61B5/0084 ,  A61B5/0075

摘要： The present invention relates to the use of polarized light to measure properties of tissue. More particularly, polarized light can be used to detect dysplasia in tissue as the polarization of back-scattered light from such tissues is preserved while the contribution of diffusely scattered light from underlying tissues can be removed. A fiber optic system for delivery and collection of light can be used to measure tissues within the human body.