发明授权
- 专利标题： Cleaning apparatus and method
- 专利标题（中）： 清洗装置及方法
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申请号： US09572227申请日： 2000-05-17
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公开(公告)号： US06178974B2公开(公告)日： 2001-01-30
- 发明人: Kanji Kobayashi , Masao Yamaguchi , Shinya Yoshihara , Toshio Kubota , Jun Kudo
- 申请人： Kanji Kobayashi , Masao Yamaguchi , Shinya Yoshihara , Toshio Kubota , Jun Kudo
- 优先权： JP9-210196 19970722
- 主分类号： B08B312
- IPC分类号： B08B312
摘要：
A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.