发明授权
- 专利标题: Method of fabricating the coating
- 专利标题(中): 制造涂层的方法
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申请号: US08998008申请日: 1997-08-13
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公开(公告)号: US06183816B2公开(公告)日: 2001-02-06
- 发明人: Shunpei Yamazaki , Kenji Itoh , Shigenori Hayashi
- 申请人: Shunpei Yamazaki , Kenji Itoh , Shigenori Hayashi
- 优先权: JP5-200251 19930720; JP5-201833 19930722; JP6-119632 19940509
- 主分类号: C23C1650
- IPC分类号: C23C1650
摘要:
In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.
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