公开(公告)号：US20050089648A1

公开(公告)日：2005-04-28

申请号：US10978461

申请日：2004-11-02

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： C23C16/26 ,  C23C16/509 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/84 ,  G11B7/24 ,  G11B11/105 ,  H05H1/24

CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US06183816B2

公开(公告)日：2001-02-06

申请号：US08998008

申请日：1997-08-13

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： C23C1650

CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US06171674B2

公开(公告)日：2001-01-09

申请号：US08910352

申请日：1997-08-13

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： G11B560

CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US4949004A

公开(公告)日：1990-08-14

申请号：US307190

申请日：1989-02-08

申请人： Shunpei Yamazaki ,  Takashi Inujima ,  Kazuo Urata ,  Mamoru Tashiro ,  Yuji Tanamura ,  Shinji Imato ,  Kenji Itoh ,  Seiichi Odaka ,  Shigenori Hayashi ,  Naoki Hirose

发明人： Shunpei Yamazaki ,  Takashi Inujima ,  Kazuo Urata ,  Mamoru Tashiro ,  Yuji Tanamura ,  Shinji Imato ,  Kenji Itoh ,  Seiichi Odaka ,  Shigenori Hayashi ,  Naoki Hirose

IPC分类号： H01J61/52

CPC分类号： H01J61/52

摘要： A mercury-vapor lamp is provided with a reservoir in which a superfluous amount of mercury is stored in the form of liquid state. The liquid mercury in the reservoir is cooled to a certain temperature. The pressure of mercury-vapor is automatically reduced to the saturated pressure of the liquid mercury cooled. In this configuration, the pressure of mercury-vapor is controlled by adjusting the temperature of the liquid mercury stored in the reservoir.

公开(公告)号：US06835523B1

公开(公告)日：2004-12-28

申请号：US09396381

申请日：1999-09-15

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： G11B724

CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic r cording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁性介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US07700164B2

公开(公告)日：2010-04-20

申请号：US10978461

申请日：2004-11-02

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： B05D1/08 ,  H05H1/26 ,  H05H1/02 ,  C23C16/00 ,  C23C16/26

CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US06299957B1

公开(公告)日：2001-10-09

申请号：US09396382

申请日：1999-09-15

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： B32B302

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

公开(公告)号：US5932302A

公开(公告)日：1999-08-03

申请号：US909573

申请日：1997-08-13

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： G11B7/254 ,  C23C16/26 ,  C23C16/27 ,  C23C16/509 ,  C23C16/54 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/84 ,  G11B7/005 ,  G11B7/24 ,  G11B7/257 ,  G11B11/105 ,  B05D3/06 ,  B06B1/00

CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B11/10584 ,  G11B11/10586 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

摘要： In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions and the coating contains pin-holes having a density of 30/mm.sup.2 or less.

摘要翻译： 在制造碳涂层的方法中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过离子轰击在物体的表面上制造涂层，并且涂层含有密度为30 / mm 2或更小的针孔。

公开(公告)号：US06468617B1

公开(公告)日：2002-10-22

申请号：US09396382

申请日：1999-09-15

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： B32B302

CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US06191492B1

公开(公告)日：2001-02-20

申请号：US08161859

申请日：1993-12-06

申请人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

发明人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

IPC分类号： H01L2328

CPC分类号： H01L24/48 ,  H01L23/3135 ,  H01L23/49586 ,  H01L24/45 ,  H01L2224/05624 ,  H01L2224/29339 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/48624 ,  H01L2224/8592 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/0101 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01045 ,  H01L2924/01047 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/05042 ,  H01L2924/00 ,  H01L2924/00012

摘要： An electronic device comprising a substrate having a frame, a metal lead and an electronic parts in a bonding structure, and a molding of an organic resin formed on the substrate, wherein the surface of the organic resin is provided with a hardened water-resistant or carbonaceous film or wherein pores at the surface of the organic resin are filled within an inactive gas such as argon because of a plasma treatment of the resin surface with the inactive gas whereby impurities are prevented from entering into the organic resin through the pores.

摘要翻译： 一种电子设备，包括具有框架，金属引线和接合结构中的电子部件的基板，以及在所述基板上形成的有机树脂的模制件，其中所述有机树脂的表面设置有硬化防水或 碳质膜或其中有机树脂表面的孔被填充在惰性气体如氩气中，因为用惰性气体等离子体处理树脂表面，从而防止杂质通过孔进入有机树脂。