发明授权
- 专利标题: Surface emitting semiconductor laser device and process for producing the same
- 专利标题(中): 表面发射半导体激光器件及其制造方法
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申请号: US09320711申请日: 1999-05-27
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公开(公告)号: US06201825B1公开(公告)日: 2001-03-13
- 发明人: Jun Sakurai , Hideo Nakayama , Hiromi Otoma , Yasuaki Miyamoto
- 申请人: Jun Sakurai , Hideo Nakayama , Hiromi Otoma , Yasuaki Miyamoto
- 优先权: JP10-149270 19980529
- 主分类号: H01S3082
- IPC分类号: H01S3082
摘要:
It is to provide a surface emitting semiconductor laser device having a long life time and uniform light output characteristics. A periphery of an upper surface and a side surface of a mesa structure is covered with a silicon oxide nitride film 34 as an inorganic insulating film, the mesa structure comprising a lower DBR 16 of a first conductive type formed on a first primary surface of an n-type GaAs substrate 12, having formed thereon an active region 24, an upper DBR 26 containing an AlAs layer 32 as the lowermost layer, and a p-type GaAs contact layer 28.
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