- 专利标题： Non-contact electrical conduction measurement for insulating films
- 专利标题（中）： 绝缘膜非接触导电测量
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申请号： US09597503申请日： 2000-06-20
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公开(公告)号： US06202029B1公开(公告)日： 2001-03-13
- 发明人: Roger L. Verkuil , Gregory S. Horner , Tom G. Miller
- 申请人： Roger L. Verkuil , Gregory S. Horner , Tom G. Miller
- 主分类号： G01R3126
- IPC分类号： G01R3126
摘要：
A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.
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