公开(公告)号：US6097196A

公开(公告)日：2000-08-01

申请号：US841501

申请日：1997-04-23

申请人： Roger L. Verkuil ,  Gregory S. Horner ,  Tom G. Miller

发明人： Roger L. Verkuil ,  Gregory S. Horner ,  Tom G. Miller

IPC分类号： G01R31/26 ,  G01R31/28

CPC分类号： G01R31/2648

摘要： A corona source is used to repetitively apply charge to an oxide layer on a semiconductor. A Kelvin probe is used to measure the resulting voltage across the layer. The tunneling field is determined based on the value of voltage at which the voltage measurement saturates.

摘要翻译： 电晕源用于重复地向半导体上的氧化物层施加电荷。 开尔文探头用于测量层间产生的电压。 基于电压测量饱和的电压值来确定隧道场。

公开(公告)号：US06448804B2

公开(公告)日：2002-09-10

申请号：US09964944

申请日：2001-09-27

申请人： Tom G. Miller ,  Roger L. Verkuil ,  Gregory S. Horner

发明人： Tom G. Miller ,  Roger L. Verkuil ,  Gregory S. Horner

IPC分类号： G01R3126

CPC分类号： G01R29/24 ,  G01R31/2656 ,  G01R31/2831

摘要： A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer, and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.

摘要翻译： 测量半导体衬底上的绝缘层的总电荷的方法包括对绝缘层施加电晕电荷，以及在施加每个电晕电荷之后测量绝缘层的表面光电压。 用库仑计测量每个电晕电荷的电荷密度。 确定获得预定固定值的表面光电压所需的总电晕电荷，并用于计算绝缘层的总电荷。 固定值对应于平带或中频带条件。

公开(公告)号：US06202029B1

公开(公告)日：2001-03-13

申请号：US09597503

申请日：2000-06-20

申请人： Roger L. Verkuil ,  Gregory S. Horner ,  Tom G. Miller

发明人： Roger L. Verkuil ,  Gregory S. Horner ,  Tom G. Miller

IPC分类号： G01R3126

CPC分类号： G01R31/2648

摘要： A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.

摘要翻译： 使用电晕源将电荷施加到绝缘层。 随着时间的推移产生的电压用于确定通过该层的电流。 所得数据确定该层的电流 - 电压特性，并可用于确定该层的隧道场。

公开(公告)号：US06191605B1

公开(公告)日：2001-02-20

申请号：US08912697

申请日：1997-08-18

申请人： Tom G. Miller ,  Roger L. Verkuil ,  Gregory S. Horner

发明人： Tom G. Miller ,  Roger L. Verkuil ,  Gregory S. Horner

IPC分类号： G01R3126

CPC分类号： G01R29/24 ,  G01R31/2656 ,  G01R31/2831

摘要： A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.

摘要翻译： 测量半导体衬底上的绝缘层的总电荷的方法包括在绝缘层上施加电晕电荷，并在施加每个电晕电荷之后测量绝缘层的表面光电压。 用库仑计测量每个电晕电荷的电荷密度。 确定获得预定固定值的表面光电压所需的总电晕电荷，并用于计算绝缘层的总电荷。 固定值对应于平带或中频带条件。

公开(公告)号：US06335630B1

公开(公告)日：2002-01-01

申请号：US09749485

申请日：2000-12-26

申请人： Tom G. Miller ,  Roger L. Verkuil ,  Gregory S. Horner

发明人： Tom G. Miller ,  Roger L. Verkuil ,  Gregory S. Horner

IPC分类号： G01R3126

摘要： A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.

公开(公告)号：US6060709A

公开(公告)日：2000-05-09

申请号：US1488

申请日：1997-12-31

申请人： Roger L. Verkuil ,  Gregory S. Horner ,  Tom G. Miller

发明人： Roger L. Verkuil ,  Gregory S. Horner ,  Tom G. Miller

IPC分类号： H01T19/00 ,  H01T19/04

CPC分类号： H01T19/00

摘要： A conductive slit screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by depositing alternating polarity corona charge until the potential of the wafer equals the potential of the screen.

摘要翻译： 导电狭缝屏幕放置在电晕枪和半导体晶片的表面之间。 通过枪施加在晶片上的电荷由施加到屏幕的电位来控制。 卡盘将晶片定位在靠近屏幕的位置。 通过沉积交替极性电晕电荷将所需的电荷施加到晶片，直到晶片的电位等于屏幕的电位。

公开(公告)号：US07714300B1

公开(公告)日：2010-05-11

申请号：US11711552

申请日：2007-02-26

申请人： Mark A. McCord ,  Tom G. Miller ,  David L. Brown

发明人： Mark A. McCord ,  Tom G. Miller ,  David L. Brown

IPC分类号： G01T1/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2444

摘要： One embodiment relates to a solid-state charged-particle detector. The detector includes a PIN diode and a conductive coating on the front-side of the PIN diode, wherein the front-side receives incident charged particles to be detected. In addition, the detector includes a metal layer on the backside of the PIN diode and electrical connections to the metal layer and to the conductive coating. Other embodiment are also disclosed.

摘要翻译： 一个实施方案涉及固态带电粒子检测器。 检测器包括PIN二极管和PIN二极管前侧的导电涂层，其中前侧接收待检测的入射带电粒子。 此外，检测器包括在PIN二极管背面的金属层和与金属层和导电涂层的电连接。 还公开了其他实施例。