发明授权
- 专利标题: Probe, method of its manufacturing, and probe-type memory
- 专利标题(中): 探针,其制造方法和探针型记忆
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申请号: US09463184申请日: 2000-01-21
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公开(公告)号: US06208789B1公开(公告)日: 2001-03-27
- 发明人: Yasushi Ogimoto
- 申请人: Yasushi Ogimoto
- 优先权: JP9-195903 19970722
- 主分类号: G02B602
- IPC分类号: G02B602
摘要:
A probe comprising a core (2) having a first end part (2a) on which light from a light source is incident and a second end part (2b) with a diameter smaller than a wavelength of the incident light and a cladding (1) covering the core (2). A thin nitride film (3) made of at least one nitride selected from titanium nitride, zirconium nitride, and hafnium nitride is formed on a surface of the core (2) on the side of the second end part (2b) except the first and second end parts (2a) and (2b). The thin nitride film (3) has a high reflectivity for light with a wavelength of longer than 600 nm and the incident light does not leak out of the probe and reaches the tip of the probe, so that the intensity of the light emitted from the tip of the probe is improved. When the probe is used in a probe-type memory, high density recording with an excellent signal quality (S/N) can be realized.
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