发明授权
US06215630B1 Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers
失效
用于磁阻换能器的类金刚石碳和氧化物双层绝缘体
- 专利标题： Diamond-like carbon and oxide bilayer insulator for magnetoresistive transducers
- 专利标题（中）： 用于磁阻换能器的类金刚石碳和氧化物双层绝缘体
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申请号： US08741277申请日： 1996-10-30
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公开(公告)号： US06215630B1公开(公告)日： 2001-04-10
- 发明人: Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
- 申请人： Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
- 主分类号： G11B533
- IPC分类号： G11B533
摘要：
A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.
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