发明授权
- 专利标题: Scanning probe microscope
- 专利标题(中): 扫描探头显微镜
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申请号: US09116319申请日: 1998-07-15
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公开(公告)号: US06242736B1公开(公告)日: 2001-06-05
- 发明人: Akihiko Honma , Takeshi Umemoto , Akira Inoue
- 申请人: Akihiko Honma , Takeshi Umemoto , Akira Inoue
- 优先权: JP9-191669 19970716; JP9-191670 19970716; JP10-191859 19980707
- 主分类号: G01N1312
- IPC分类号: G01N1312
摘要:
A scanning probe microscope for scanning a probe needle in proximity to a surface of a sample in XY-axis directions while moving at least one of the probe and the sample in a Z-axis direction has a plurality of band-pass filters for passing a plurality of band-pass signals by extracting predetermined frequency bands different one another from a surface geometry signal output by a probe. An image memory stores the respective band-pass signals and corresponding positions on the sample surface, and a color image outputting device outputs a color image by treating each of the respective band-pass signals stored as image data in the image memory as different color data and combining the data. The plurality of band-pass signals includes a first band-pass signal having a first frequency range set to include only abrupt transitions in the sample surface and a second band-pass signal having a second frequency range set to include frequencies slightly outside the first frequency range so that abrupt transitions in geometry on the sample surface are represented by a first color in response to the first band-pass signal and areas directly adjacent the abrupt transitions on the sample surface are represented by a second color different from the first color.
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