Access apparatus and available storage space calculation method
    1.
    发明授权
    Access apparatus and available storage space calculation method 有权
    访问装置和可用的存储空间计算方法

    公开(公告)号:US09015444B2

    公开(公告)日:2015-04-21

    申请号:US12672373

    申请日:2009-06-05

    IPC分类号: G06F12/00 G06F3/06 G06F17/30

    摘要: A method used in an access module that uses a file system to manage a nonvolatile memory of an information recording module enables an available storage space to be calculated in a short time before file data is recorded, and shortens the time required from initialization of the file system to recording. An access module (1) manages information about area management of the file system configured in an information recording module in units of fixed-length blocks. A divisional available storage space calculation unit (103) performs an available storage space calculation process in units of the fixed-length blocks, and completes preparations for recording when detecting a minimum required storage space for recording file data and enables recording of the file data. This shortens the time required from initialization of the file system to recording.

    摘要翻译: 在使用文件系统管理信息记录模块的非易失性存储器的访问模块中使用的方法使得能够在文件数据被记录之前的短时间内计算可用存储空间,并且缩短文件初始化所需的时间 系统录音。 访问模块(1)以固定长度块为单位管理在信息记录模块中配置的文件系统的区域管理的信息。 分割可用存储空间计算单元(103)以固定长度块为单位执行可用存储空间计算处理,并且在检测用于记录文件数据的最小所需存储空间并完成文件数据的记录时,完成记录准备。 这缩短了从文件系统初始化到录制所需的时间。

    Scanning Probe Microscope and Scanning Method
    2.
    发明申请
    Scanning Probe Microscope and Scanning Method 有权
    扫描探针显微镜和扫描方法

    公开(公告)号:US20080156988A1

    公开(公告)日:2008-07-03

    申请号:US11961847

    申请日:2007-12-20

    IPC分类号: G01N23/00

    CPC分类号: G01Q10/06

    摘要: To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.

    摘要翻译: 为了实现适应于表面的形状,缩短测量时间并且通过根据表面的形状的斜率设置采样间隔并根据间隔来控制触笔来提高测量精度, 扫描探针显微镜,其中扫描探针时,将之前立即存在的观测数据作为历史存储,基于观察数据的形状,每次设置X或Y方向上的采样间隔,并且对扫描仪进行扫描 到连续取样位置。

    Manufacturing inspection/analysis system analyzing device, analyzing device control program, storage medium storing analyzing device control program, and method for manufacturing inspection and analysis
    3.
    发明申请
    Manufacturing inspection/analysis system analyzing device, analyzing device control program, storage medium storing analyzing device control program, and method for manufacturing inspection and analysis 有权
    制造检验/分析系统分析装置,分析装置控制程序,存储分析装置控制程序的存储介质以及制造检验和分析的方法

    公开(公告)号:US20060203230A1

    公开(公告)日:2006-09-14

    申请号:US11369934

    申请日:2006-03-08

    IPC分类号: G01N21/88

    摘要: A position change section of a processing device changes the position of a treatment object, at the time of performing a process by a process section, to correspond to a predetermined position in conformity to the treatment object. An inspection device inspects the occurrence of a defect on the treatment object having been subjected to processes by a plurality of processing devices. Then an analyzing process for specifying in which processing device the defect occurred is carried out based on (i) positional information of the treatment object, in each of the processing devices, and (ii) defect information defected by the inspection device. With this arrangement, during the process of manufacture of treatment objects, it is possible to precisely specify which processing device or processing device group caused the defect, without performing processes such as attaching, to the treatment object, information regarding processing devices which have conducted processes.

    摘要翻译: 处理装置的位置改变部分在执行处理部分的处理时改变处理对象的位置,以对应于与处理对象一致的预定位置。 检查装置检查已经经过多个处理装置的处理的处理对象的缺陷的发生。 然后,根据(i)处理对象的位置信息,每个处理装置,以及(ii)检测装置所缺陷的缺陷信息,进行用于指定哪个处理装置发生缺陷的分析处理。 通过这种布置,在处理对象的制造过程中,可以精确地指定哪个处理装置或处理装置组造成缺陷,而不进行诸如将处理对象附加到已经进行处理的处理装置的信息的处理 。

    Semiconductor device with multi-layer interlayer dielectric film
    4.
    发明授权
    Semiconductor device with multi-layer interlayer dielectric film 失效
    具有多层层间绝缘膜的半导体器件

    公开(公告)号:US06765283B2

    公开(公告)日:2004-07-20

    申请号:US10201646

    申请日:2002-07-24

    申请人: Takeshi Umemoto

    发明人: Takeshi Umemoto

    IPC分类号: H01L2358

    摘要: A semiconductor device comprising: an underlayer interconnect layer; an interlayer dielectric film formed with a connection hole reaching the underlayer interconnect layer; and an upper interconnect layer buried in the connection hole, wherein the interlayer dielectric film includes an insulating film containing an impurity for detecting a first etching end point, a first insulating film, an insulating film containing an impurity for detecting a second etching end point and a second insulating film, these four films being laminated in this order.

    摘要翻译: 一种半导体器件,包括:下层互连层; 形成有到达下层互连层的连接孔的层间绝缘膜; 以及埋入所述连接孔中的上互连层,其中所述层间电介质膜包括含有用于检测第一蚀刻终点的杂质的绝缘膜,第一绝缘膜,含有用于检测第二蚀刻终点的杂质的绝缘膜, 第二绝缘膜,这四个膜依次层压。

    RECORDING DEVICE AND METHOD FOR ACTIVATING THE SAME
    6.
    发明申请
    RECORDING DEVICE AND METHOD FOR ACTIVATING THE SAME 审中-公开
    记录装置及其活化方法

    公开(公告)号:US20110083007A1

    公开(公告)日:2011-04-07

    申请号:US12997348

    申请日:2009-06-08

    IPC分类号: G06F9/24

    摘要: A recording device (101) can record data to a recording medium (164) that executes initialization operation when the recording medium (164) receives an initialization command, and the recording device (101) includes controller (160) for controlling operation of the recording device (101) and storage unit (190) for storing an operating system (5) which is executed by the controller (160) after a start-up of the recording device (101) is completed, and provides a predetermined function. The controller (160) performs start-up control so that the controller provides an instruction for initializing the recording medium when the recording device (101) is powered on, and, in parallel with the initialization of the recording medium (164), the controller (160) executes initialization of the operating system (5).

    摘要翻译: 记录装置(101)可以在记录介质(164)接收到初始化命令时将数据记录到执行初始化操作的记录介质(164),并且记录装置(101)包括用于控制记录操作的控制器(160) 完成了在记录装置(101)启动之后由控制器(160)执行的用于存储操作系统(5)的装置(101)和存储单元(190),并提供预定的功能。 控制器(160)执行启动控制,使得当记录装置(101)通电时,控制器提供用于初始化记录介质的指令,并且与记录介质(164)的初始化并行,控制器 (160)执行操作系统(5)的初始化。

    AFM Tweezers, Method for Producing AFM Tweezers, and Scanning Probe Microscope
    7.
    发明申请
    AFM Tweezers, Method for Producing AFM Tweezers, and Scanning Probe Microscope 有权
    AFM镊子,生产AFM镊子的方法和扫描探针显微镜

    公开(公告)号:US20090000365A1

    公开(公告)日:2009-01-01

    申请号:US12143410

    申请日:2008-06-20

    IPC分类号: G12B21/08

    摘要: AFM tweezers includes: a first probe that comprises a triangular prism member having a ridge, a tip of which is usable as a probe tip in a scanning probe microscope; a second probe that comprises a triangular prism member provided so as to open/close with respect to the first probe. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.

    摘要翻译: AFM镊子包括:第一探针,其包括具有脊的三角形棱镜构件,其尖端可用作扫描探针显微镜中的探针尖端; 第二探针,包括设置成相对于第一探针打开/关闭的三角形棱镜部件。 第一探针和第二探针并置,使得第一探针的三角形棱镜构件的预定外周表面和第二探针的三角形棱镜构件的预定外周表面基本上彼此平行,并且第一探针 形成为当样品被脊的尖端扫描时防止样品干扰的凹口。

    Scanning probe microscope
    9.
    发明授权
    Scanning probe microscope 失效
    扫描探头显微镜

    公开(公告)号:US06242736B1

    公开(公告)日:2001-06-05

    申请号:US09116319

    申请日:1998-07-15

    IPC分类号: G01N1312

    CPC分类号: G01Q30/04 Y10S977/85

    摘要: A scanning probe microscope for scanning a probe needle in proximity to a surface of a sample in XY-axis directions while moving at least one of the probe and the sample in a Z-axis direction has a plurality of band-pass filters for passing a plurality of band-pass signals by extracting predetermined frequency bands different one another from a surface geometry signal output by a probe. An image memory stores the respective band-pass signals and corresponding positions on the sample surface, and a color image outputting device outputs a color image by treating each of the respective band-pass signals stored as image data in the image memory as different color data and combining the data. The plurality of band-pass signals includes a first band-pass signal having a first frequency range set to include only abrupt transitions in the sample surface and a second band-pass signal having a second frequency range set to include frequencies slightly outside the first frequency range so that abrupt transitions in geometry on the sample surface are represented by a first color in response to the first band-pass signal and areas directly adjacent the abrupt transitions on the sample surface are represented by a second color different from the first color.

    摘要翻译: 扫描探针显微镜,用于在沿Z轴方向移动探头和样本中的至少一个的同时沿XY轴方向扫描样品表面附近的探针,具有多个带通滤波器,用于使 通过从由探针输出的表面几何信号中提取彼此不同的预定频带,来产生多个带通信号。 图像存储器将各个带通信号和相应的位置存储在样本表面上,并且彩色图像输出装置通过将作为图像数据存储的各个带通信号中的每一个作为不同的颜色数据进行处理来输出彩色图像 并组合数据。 多个带通信号包括具有第一频率范围的第一带通信号,其中第一频率范围被设置为仅包括采样表面中的突变,以及具有第二频率范围的第二带通信号,第二频带设置为包括稍微在第一频率之外的频率 范围,使得样品表面上的几何形状的突变过渡由第一颜色响应于第一带通信号表示,并且与样品表面上的突然跃迁直接相邻的区域由不同于第一颜色的第二颜色表示。